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Synthesis of graphene by various PVD methods: (a) vacuum evaporation, (b) and (c) sputter evaporation, (d) FCVA, (e-g) ion plating, and (h) IBAD.

Synthesis of graphene by various PVD methods: (a) vacuum evaporation, (b) and (c) sputter evaporation, (d) FCVA, (e-g) ion plating, and (h) IBAD.

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A review of graphene synthesis by indirect and direct deposition methods - Volume 35 Issue 1 - Yanxia Wu, Shengxi Wang, Kyriakos Komvopoulos

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... whereas the PVD methods provide high purity, low temperature, high throughput, and controllable growth of graphene on a wide range of substrate materials [31,32]. Depending on the energy source, PVD growth of graphene can be achieved by vacuum evaporation, sputter deposition, cathodic arc, ion plating, and ion beam-assisted deposition (IBAD) (Fig. ...

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