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1: Scanning electron microscope (SEM) images of structures etched with two different Bosch process-based recipes with varying etching times: (a) t etch = 1.75 s with larger scallops, and (b) t etch = 0.45 s with smoother walls. Scalebar = 3 µm.

1: Scanning electron microscope (SEM) images of structures etched with two different Bosch process-based recipes with varying etching times: (a) t etch = 1.75 s with larger scallops, and (b) t etch = 0.45 s with smoother walls. Scalebar = 3 µm.

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Thesis
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Analytical techniques are essential in detecting components within complex samples retrieved from various applications, e.g., rapidly detecting pathogens to prevent an outbreak. High Performance Liquid Chromatography (HPLC), is an analytical technique, in which a sample is pumped through a packed bed of microspheres (the column). Within this column...

Citations

... blue circle in Fig. 1b-right image) [2]. To overcome and improve this limitation and previous efforts, profiled perforated devices, as shown in Fig. 1c, resembling a funnel-like structure, were micromachined [3]. As a result, the area between the pores decreases, ensuring that particles are guided adequately towards the pores. ...
Conference Paper
Here, we propose a universal technique to firmly capture dispersed microparticles on any desired two-dimensional array of through-pores on a surface. The 10 μm silica or polystyrene particles are reversibly captured, making them accessible for direct manipulation and inspection or subsequent transfer to other surfaces. To obtain perfect arrays with a pitch of 1.25 μm, perforated devices with profiled surfaces were required. Additionally, the method has proven successful for both types of particles, either dispersed in water or ethanol. The assembly technique may serve as a platform for manufacturing hierarchical materials, e.g., ordered chromatography packings, or performing cellular assays.