Mass spectrum of the surface of porous xerogel of multicrystalline substrates of silicon, which is produced under static mode on the mass spectrometer TOF5 SIMS. Mass (u) is the mass number. Intensity (counts) is the intensity (number of pulses obtained)

Contexts in source publication

Context 1

... performed an analysis of elemental composition of the surface of a xerogel using the method of mass spectrometry of secondary ions (Fig. 5) after technological process of creating organic stack, grown on a silicon macro ...

Context 2

... substrate using mass spectrometer (SIMS), unambiguously indicates that in the process of synthesis of porous xerogel there occurs the introduction of atomic hydrogen to its structure and the passivation of broken silicon bonds. This is confirmed by experiments on secondary ions under static mode using the mass spectrometer. The mass-spectrum (Fig. 5) shows steady intensity (number of pulses obtained) of secondary ions ( 2 H + ) and ( 3 CH + ) of the surface of xerogel of a multicrystalline substrate. In the future, it is necessary to optimize technological process of the formation of hybrid structures for SC. The least expensive part of the technological process is a solgel method ...