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MEMS thermal gas property sensor.
Contexts in source publication
Context 1
... direct heat transfer of a polysilicon heater to the surrounding gas is measured with polysilicon/aluminum thermopiles with their hot junctions located close to the heater (see Fig. 1). In contrast to the measurement of the temperature-dependent heater resistance R, this approach allows higher sensitivity in addition to galvanic isolation. For detection of gas properties, the perforated heater is periodically excited with an electrical voltage U and the resulting response signal of the thermocouples UTP is measured ...
Context 2
... direct heat transfer of a polysilicon heater to the surrounding gas is measured with polysilicon/aluminum thermopiles with their hot junctions located close to the heater (see Fig. 1). In contrast to the measurement of the temperature-dependent heater resistance R, this approach allows higher sensitivity in addition to galvanic isolation. For detection of gas properties, the perforated heater is periodically excited with an electrical voltage U and the resulting response signal of the thermocouples UTP is measured ...
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