MEMS based 3-Watt CMOS resistojet [30] .

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... do this one of the methods implemented is using multiple flow channels within the heater itself. Resistojets based on microelectromechanical systems (MEMS) flow channels are interlaced along with the heater ( Fig. 5 ). Such flow channels are manufactured using standard CMOS processes and then anisotropic etching to create the flow channel [30] . ...

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... geometry, are important factors for nozzles that produce thrust in the range of a few mN. In Fig. 6 , except for nozzle 4, which is constructed as a slit (2-D) nozzle with a length of 100 m and a little higher expansion ratio than the others, all of the nozzles are axisymmetric. The discharge coefficient calculation by use of the results shown in Fig. 5 , nozzle 1 performs optimally in terms of impulse. Nozzles 2 and 3 are inadequate than expected, while nozzle 4 falls short of expectations despite having a higher expansion ratio. The estimated thruster performance of nozzle 4 at 550 K and 773 K, two distinct values of chamber temperature assume a 50 g total propellant use at a ...