Figure - uploaded by Agne Zukauskaite
Content may be subject to copyright.
LDV measurement results for the resonant and static deflections of the MOEMS Designs with different transducer materials.
Source publication
![Figure 5. Schematic of the experimental setup [9].](profile/Agne-Zukauskaite-2/publication/360033212/figure/fig2/AS:1146492005949440@1650356403012/Schematic-of-the-experimental-setup-9_Q320.jpg)
Piezoelectric micromirrors with aluminum nitride (AlN) and aluminum scandium nitride (Al0.68Sc0.32N) are presented and compared regarding their static deflection. Two chip designs with 2 × 3 mm2 (Design 1) and 4 × 6 mm2 (Design 2) footprint with 600 nm AlN or 2000 nm Al0.68Sc0.32N as piezoelectric transducer material are investigated. The chip with...
Citations
... The same research group, in 2022, presented statically actuated high-voltage micromirrors based on AlN and aluminum scandium nitride (AlScN) [189]. For the same size of devices, the use of AlScN elevated the maximum scan angle from 8.4 • for AlN-based micromirrors to 38.4 • for AlScN-based micromirrors. ...
Micromirrors have recently emerged as an essential component in optical scanning technology, attracting considerable attention from researchers. Their compact size and versatile capabilities, such as light steering, modulation, and switching, are leading them as potential alternatives to traditional bulky galvanometer scanners. The actuation of these mirrors is critical in determining their performance, as it contributes to factors such as response time, scanning angle, and power consumption. This article aims to provide a thorough exploration of the actuation techniques used to drive micromirrors, describing the fundamental operating principles. The four primary actuation modalities—electrostatic, electrothermal, electromagnetic, and piezoelectric—are thoroughly investigated. Each type of actuator’s operational principles, key advantages, and their limitations are discussed. Additionally, the discussion extends to hybrid micromirror designs that combine two types of actuation in a single device. A total of 208 closely related papers indexed in Web of Science were reviewed. The findings indicate ongoing advancements in the field, particularly in terms of size, controllability, and field of view, making micromirrors ideal candidates for applications in medical imaging, display projections, and optical communication. With a comprehensive overview of micromirror actuation strategies, this manuscript serves as a compelling resource for researchers and engineers aiming to utilize the appropriate type of micromirror in the field of optical scanning technology.
... In the last section, six papers address the fabrication and performance of various AlScN-based devices [12][13][14][15][16][17]. It has been recognized quite early in the development of AlScN that the etching rate drops dramatically compared to pure AlN, and the existing etching approaches used for group-III nitrides must be revised, especially when vertical side-wall geometry has to be well controlled. ...
... In the best-performing compensated film, this allowed cantilever bending to be reduced from >100 µm to less than 3 µm. The theme of deflection continues in the next study, where AlN and AlScN-based micromirrors are fabricated by Stoeckel et al. [15]. Footprint MOEMS of 2 × 3 mm 2 and 4 × 6 mm 2 were designed, with geometrical parameters adjusted based on different mechanical properties of AlScN. ...
The enhanced piezoelectric properties of aluminum scandium nitride (Al1−xScxN or AlScN) were discovered in 2009 by Morito Akiyama’s team [...]
In recent years, micro-electromechanical systems (MEMSs) have found broad applications in various sensors. However, aside from quartz crystal microbalances, they have not yet been utilized in plasma analysis. Building on previous work with piezoelectric MEMS, the functionality of a MEMS-based sensor system capable of measuring the ion angular distribution function on the wafer holder surface is demonstrated. To enable this functionality, an array of high aspect ratio holes was added to the tiltable silicon plate of a piezoelectric MEMS. These holes allow for the filtering of incoming ions based on their angle perpendicular to the surface of the tiltable element. An algorithm was developed to fit the width and mean of the ion angular distribution function (IADF) based on the RMS ion current for various MEMS amplitudes. Compared to previously used methods for measuring the IADF, the MEMS presented in this paper represents a significant miniaturization. This work is the first to successfully characterize the angular distribution function of ions using a MEMS.
The ability of piezoelectric materials to convert mechanical energy into electric energy and vice versa has made them desirable in the wide range of applications that oscillate from medicine to the energetics industry. Their implementation in optical communication is often connected with the modulation or other manipulations of the light signals. In this article, the recent advancements in the field of piezoelectrics-based devices and their promising benefits in optical communication are explored. The application of piezoelectrics-based devices in optical communication allows dynamic control, modulation, and manipulation of optical signals that lead to a more reliable transmission. It turns out that a combination of artificial-intelligence-based algorithms with piezoelectrics can enhance the performance of these devices, including optimization of piezoelectric modulation, adaptive signal processing, control of optical components, and increase the level of energy efficiency. It can enhance signal quality, mitigate interference, and reduce noise-connected issues. Moreover, this technological fusion can increase the security of optical communication systems. Finally, the potential future research lines are determined.
This work investigates the physical properties of Al1−xScxN thin films sputtered at low temperatures by varying the process conditions. Specifically, the films were deposited at room temperature by applying a radio frequency power equal to 150 W to an AlSc alloy (60:40) target, varying the nitrogen flux percentage in the (Ar + N2) sputtering atmosphere (30%, 40%, 50%, and 60%) and keeping constant the working pressure at 5 × 10⁻³ mbar. The structural and chemical properties of the Al1−xScxN films were studied by x-ray diffraction and Rutherford backscattering spectrometry techniques, respectively. The piezoelectric response was investigated by piezoresponse force microscopy. In addition, the surface potential was evaluated for the first time for Sc-doped AlN thin films by Kelvin probe force microscopy, providing piezoelectric coefficients free from the no-piezoelectric additional effect to the mechanical deformation, i.e., the electrostatic force. By alloying AlN with scandium, the piezoelectric response was strongly enhanced (up to 200% compared to undoped AlN), despite the low deposition temperature and the absence of any other additional energy source supplied to the adatoms during thin film growth, which generally promotes a better structural arrangement of polycrystalline film. This is a strategic result in the field of microelectromechanical systems completely fabricated at low temperatures.
