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We developed a method to analyze broad-band ferromagnetic resonance (FMR) data for rectangular ferromagnetic bars of micron and submicron thicknesses. This method allows one to determine the gyromagnetic ratio, the saturation magnetization, and the damping constant of the measured structures. The proposed technique can be used for nondestructive te...
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Context 1
... the m ជ V time dependence is identical with that of h V due to the linearity of the equation, i.e., the complex amplitude of oscillatory magnetization is given by m ជ ̇ = m ជ ϫ exp ͑ i t ͒ , Re ͑ m ជ ̇ ͒ = m ជ V . The investigated ferromagnetic metallic samples were prepared by electrochemical deposition onto Si substrates, and have the shape of rectangular bars of micron and submicron thicknesses. The materials and dimensions of the exam- ined samples are listed in Table I. The fabrication process started with the sputter deposition of a Permalloy seed layer onto a Si substrates. A positive photoresist was spin-coated onto Permalloy templates. Applying UV lithography, the photoresist layer was patterned. Before the electrodeposition was carried out, the resist at the rim of the substrate was stripped. For the plating process, a pulse current deposition was used, applying forward and reverse pulses for compositions Ni 45 Fe 55 and Ni 81 Fe 19 ͑ see Table II ͒ . For Co 35 Fe 65 , a sequence of forward pulses combined with a dwell periods without current was used. For each composition, samples with a thickness of 0.4 m, 1 m, and 2.5 m were cre- ated. After the electrodeposition, the samples were pla- narized using chemical-mechanical polishing. The thin-film process ended with an ion beam etching of the seed layer. Afterwards, the wafers were diced into chips. The example of the atomic force microscopy ͑ AFM ͒ image is shown in Fig. 1 for the Permalloy sample no. 3. The AFM analysis indicated that the average surface roughness was on the order of 6 nm in all the samples. The maximum measured difference in height for many measurements was about 20 nm. This indicates fair uniformity for samples with thickness on the order of 1 m. Due to shape anisotropy, the internal oscillatory magnetic field at any location inside the sample depends on the variable magnetization distribution. Similarly, the internal static magnetic field distribution depends on the static magnetization distribution. Thus, in terms of complex amplitudes, H ជ is written as H ជ = H ជ − N J M ជ and h ជ as h ជ = h ជ − N D m ជ , where H E 0 is the applied static biasing magnetic field, N J S is the static demagnetizing tensor, h ជ E is the applied driving magnetic field, and N J D is the dynamic demagnetizing tensor. We are assuming that it is possible to express the static demagnetizing field as − N J S M ជ 0 and the dynamic demagnetizing field as − N J D m ជ in terms of these demagnetizing 14 tensors. Such an approach follows Kittel, except that the components of the demagnetizing tensor of the rectangular bars are averaged values 20 ͑ i.e., the internal field inside the bar is nonuniform ͒ , and N J S is not identical to N J D due to the skin effect in conducting metallic ferromagnets. The typical skin depth in high conductivity ferromagnets at microwave frequencies is on the order of 0.1 m, and the dynamic demagnetizing field quickly decays and can be considered neg- ligible far from the surface ͑ a few skin depths ͒ . The interaction between the high-frequency magnetic field and the ferromagnetic metallic material thus occurs mainly close to the surface. In the case of in-plane H ជ E 0 the internal biasing field H ជ 0 increases close to the surface 20 as well as the magnitude of h ជ . The ferromagnetic bars therefore have a higher dynamic demagnetizing field induced by the higher driving field in that surface layer, and a smaller average static demagnetizing field in the interaction region compared to non- conductive samples with the same dimensions. The orientation of the ferromagnetic bars with respect to the biasing magnetic field in all experiments is shown in Fig. 2. The z -axis of each bar was along the signal line of the coplanar waveguide in the experimental setup described later. That way, the biasing static magnetic field coincided with the direction of propagation of the microwave, and a microwave magnetic field was generated in xy -plane due to the high-frequency current. For the microwave frequencies ͑ 0–40 GHz ͒ used here, the dimensions of the samples and the width of the signal line are substantially smaller than the electromagnetic wavelength in air or in the coplanar waveguide. One can therefore neglect the nonuniform distribution of high-frequency current in the signal line under the sample as well as the corresponding nonuniform distribution of the high-frequency magnetic field interacting with the sample. In the coordinate system depicted in Fig. 2, the tensors and vectors from Eq. ͑ 4 ͒ are written as N X 0 0 N 11 0 0 N J S = 0 N Y 0 , N J D = 0 N 22 0 , 0 0 N 0 0 ...
Context 2
... the m ជ V time dependence is identical with that of h V due to the linearity of the equation, i.e., the complex amplitude of oscillatory magnetization is given by m ជ ̇ = m ជ ϫ exp ͑ i t ͒ , Re ͑ m ជ ̇ ͒ = m ជ V . The investigated ferromagnetic metallic samples were prepared by electrochemical deposition onto Si substrates, and have the shape of rectangular bars of micron and submicron thicknesses. The materials and dimensions of the exam- ined samples are listed in Table I. The fabrication process started with the sputter deposition of a Permalloy seed layer onto a Si substrates. A positive photoresist was spin-coated onto Permalloy templates. Applying UV lithography, the photoresist layer was patterned. Before the electrodeposition was carried out, the resist at the rim of the substrate was stripped. For the plating process, a pulse current deposition was used, applying forward and reverse pulses for compositions Ni 45 Fe 55 and Ni 81 Fe 19 ͑ see Table II ͒ . For Co 35 Fe 65 , a sequence of forward pulses combined with a dwell periods without current was used. For each composition, samples with a thickness of 0.4 m, 1 m, and 2.5 m were cre- ated. After the electrodeposition, the samples were pla- narized using chemical-mechanical polishing. The thin-film process ended with an ion beam etching of the seed layer. Afterwards, the wafers were diced into chips. The example of the atomic force microscopy ͑ AFM ͒ image is shown in Fig. 1 for the Permalloy sample no. 3. The AFM analysis indicated that the average surface roughness was on the order of 6 nm in all the samples. The maximum measured difference in height for many measurements was about 20 nm. This indicates fair uniformity for samples with thickness on the order of 1 m. Due to shape anisotropy, the internal oscillatory magnetic field at any location inside the sample depends on the variable magnetization distribution. Similarly, the internal static magnetic field distribution depends on the static magnetization distribution. Thus, in terms of complex amplitudes, H ជ is written as H ជ = H ជ − N J M ជ and h ជ as h ជ = h ជ − N D m ជ , where H E 0 is the applied static biasing magnetic field, N J S is the static demagnetizing tensor, h ជ E is the applied driving magnetic field, and N J D is the dynamic demagnetizing tensor. We are assuming that it is possible to express the static demagnetizing field as − N J S M ជ 0 and the dynamic demagnetizing field as − N J D m ជ in terms of these demagnetizing 14 tensors. Such an approach follows Kittel, except that the components of the demagnetizing tensor of the rectangular bars are averaged values 20 ͑ i.e., the internal field inside the bar is nonuniform ͒ , and N J S is not identical to N J D due to the skin effect in conducting metallic ferromagnets. The typical skin depth in high conductivity ferromagnets at microwave frequencies is on the order of 0.1 m, and the dynamic demagnetizing field quickly decays and can be considered neg- ligible far from the surface ͑ a few skin depths ͒ . The interaction between the high-frequency magnetic field and the ferromagnetic metallic material thus occurs mainly close to the surface. In the case of in-plane H ជ E 0 the internal biasing field H ជ 0 increases close to the surface 20 as well as the magnitude of h ជ . The ferromagnetic bars therefore have a higher dynamic demagnetizing field induced by the higher driving field in that surface layer, and a smaller average static demagnetizing field in the interaction region compared to non- conductive samples with the same dimensions. The orientation of the ferromagnetic bars with respect to the biasing magnetic field in all experiments is shown in Fig. 2. The z -axis of each bar was along the signal line of the coplanar waveguide in the experimental setup described later. That way, the biasing static magnetic field coincided with the direction of propagation of the microwave, and a microwave magnetic field was generated in xy -plane due to the high-frequency current. For the microwave frequencies ͑ 0–40 GHz ͒ used here, the dimensions of the samples and the width of the signal line are substantially smaller than the electromagnetic wavelength in air or in the coplanar waveguide. One can therefore neglect the nonuniform distribution of high-frequency current in the signal line under the sample as well as the corresponding nonuniform distribution of the high-frequency magnetic field interacting with the sample. In the coordinate system depicted in Fig. 2, the tensors and vectors from Eq. ͑ 4 ͒ are written as N X 0 0 N 11 0 0 N J S = 0 N Y 0 , N J D = 0 N 22 0 , 0 0 N 0 0 ...
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Citations
... This arrangement ensured good coupling between all three principal components, with the SRR separated from the CPW by only a thin (1.3 μm) layer of photoresist, and the permalloy separated from the SRR by the 8 μm SU-8 layer. The CPW, plus multilayer assembly, was subsequently placed in an electromagnet and connected to a vector network analyzer (VNA) (HP E5071C), as in the commonly used technique of VNA-FMR [43][44][45]. The cables connecting the CPW to the VNA were passed through holes drilled through the two magnet pole pieces. ...
... During resonance of the hybrid metamolecule system, absorption and/or scattering of the rf-field causes changes in the impedance/transmission of the CPW. These changes are detected by the VNA and stored in the form of a 2 × 2 scattering matrix, S. In practice, the transmission parameter S 21 is most commonly used in VNA-FMR experiments [23,[43][44][45]. By sweeping both the frequency (ν) and the magnetic field (B a ), 2D S 21 maps of ν versus B a can be obtained. ...
Coupling magnetic elements to metamaterial structures creates hybrid metamolecules with new opportunities. Here we report on the magnetic control of a metamolecule resonance, by utilizing the interaction between a single split ring resonator (SRR) and a magnetic thin film of permalloy. To suppress eddy current shielding, the permalloy films are patterned into arrays of 30–500 μm diameter discs. Strong hybridized resonances were observed at the anticrossing between the split ring resonance and the ferromagnetic resonance (FMR) of the permalloy. In particular, it is possible to achieve 40 dB modulation of the electric (symmetric) mode of the SRR on sweeping the applied magnetic field through the SRR/FMR anticrossing. The results open the way to the design of planar metamaterials, with potential applications in nonlinear metamaterials, tunable metamaterials and spintronics.
For designing and fabricating magnetic microactuators, both soft and hard magnetic materials may be required. For soft magnetic
materials, a high saturation flux density Bs and a great relative permeability µr is desirable; for forming efficient permanent magnets, hard magnetic materials require a high maximal energy product |BH|max. In the area of soft magnetic materials, investigations on NiFe81/19, NiFe45/55, and CoFe were carried out, while an example
for a hard magnetic material providing a high energy product is SmCo. Since patterned thin-film magnets feature inferior magnetic
properties compared to bulk magnets, a method of determining their magnetic properties was developed.