Figure 8. Evolution of the contact resistivity computed for a doping concentration of 6 × 10 13 |e|/cm 2 using the step barrier formalism of Reference 3. An effective mass of 0.526 m 0 (black circles), 0.701m 0 (open circles), 0.654m 0 (light-gray circles) for MoS 2 , HfS 2 and ZrS 2 respectively was used in the [100] direction. ) unless CC License in place (see abstract). ecsdl.org/site/terms_use address. Redistribution subject to ECS terms of use (see 139.81.183.231 Downloaded on 2018-05-25 to IP 

Evolution of the contact resistivity computed for a doping concentration of 6 × 10 13 |e|/cm 2 using the step barrier formalism of Reference 3. An effective mass of 0.526 m 0 (black circles), 0.701m 0 (open circles), 0.654m 0 (light-gray circles) for MoS 2 , HfS 2 and ZrS 2 respectively was used in the [100] direction. ) unless CC License in place (see abstract). ecsdl.org/site/terms_use address. Redistribution subject to ECS terms of use (see 139.81.183.231 Downloaded on 2018-05-25 to IP