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Nb 2 O 5 thin films were deposited through sol-gel technique and then the films were annealed at temperature 300, 400, 500 and 600°C. The effect of annealing temperatures on the physical properties of the films was analyzed by several characterization techniques. Secondary ion mass spectroscopy analysis results indicated that uniform Nb and O distr...
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Context 1
... root mean square (RMS) of the surface roughness plays an important role to observe the annealing effect on surface properties. Two-dimensional (2D) and three-dimensional (3D) AFM surface topography images in 5x5 µm 2 area of the Nb2O5 thin films deposited on Si substrate were represented in Fig. 4. As seen in Fig. 4, as-deposited Nb2O5 thin film has uniformity and homogeneity. However, there are small holes on the surface of the films annealed at 300 ℃ which come from the substrate due to sol-gel spin coating technique used in the experiment. The widths of holes on the surface range from 25-150 nm and the depths were about 5 nm. ...
Context 2
... root mean square (RMS) of the surface roughness plays an important role to observe the annealing effect on surface properties. Two-dimensional (2D) and three-dimensional (3D) AFM surface topography images in 5x5 µm 2 area of the Nb2O5 thin films deposited on Si substrate were represented in Fig. 4. As seen in Fig. 4, as-deposited Nb2O5 thin film has uniformity and homogeneity. However, there are small holes on the surface of the films annealed at 300 ℃ which come from the substrate due to sol-gel spin coating technique used in the experiment. The widths of holes on the surface range from 25-150 nm and the depths were about 5 nm. Additionally, it ...
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