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Configuration of the sensor head. The diaphragm deflects under pressure changing the Fabry-Perot cavity length between the diaphragm mirror and fiber end surface.
Source publication
Fabry-Perot interferometers (FPI) have been used for pressure transducers. Most of the current FPI pressure sensors measure amplitude changes of the reflected signals from a deformable diaphragm. A new technique to design an FPI pressure sensor has been proposed in this paper. The proposed methodology aims to maximize the sensitivity by measuring f...
Context in source publication
Context 1
... cavity. The cavity spacing is large enough so the spectral shape of the interferometer is wide in wavelength. When the cavity length changes due to the pressure change the amplitude of the reflected signal changes, following which the spectral shape changes. This paper aims to provide a guideline for designing and modeling a new FPI sensor [3]. Fig. 1 shows the configuration of the sensor. To keep the sensor size small, we proposed to build the diaphragm directly on the cross section in the end surface of an optical fiber. The diaphragm could be formed by electroplating or sputtering with a sacrificial layer to define the cavity height. The proposed sensor detects frequency shifts ...
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Fibre optic Fabry-Perot interferometric pressure sensors have proved many orders of excellent measurements system, but they suffer from limitations in sensitivity and resolution caused by the trade-off in designing the sensor when very thin diaphragm is needed. By reducing the diaphragm thickness increases the deflection range, but reduces the diap...
The trade-off between sensitivity and linearity has been the major problem in designing the piezoresistive pressure sensors for low pressure ranges. To resolve the problem, a novel peninsula-structured diaphragm with specially designed piezoresistors was proposed. Finite element method (FEM) was adopted for analyzing the sensor performance as well...
Citations
A novel design for a Fabry-Perot Interferometric Sensor (FPIS) consisting of a Fabry-Perot cavity formed between two bonded surfaces is discussed The Fabry-Perot cavity and the optical fiber to which it is coupled are used as the sensing element and interconnect, respectively. The Fabry-Perot cavity is fabricated using the Micro Electro Mechanical Systems (MEMS) technology. The introduction of a center rigid body diaphragm gives this sensor considerable advantage when compared with previous Fabry-Perot cavity based sensors.
