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Zusammenfassung
Kalorimetrische Strömungssensoren sind eine sehr verbreitete Art von thermischen Strömungssensoren. Sie werten eine strömungsbedingte Verzerrung des Temperaturfeldes um eine Wärmequelle aus. Im einfachsten Betriebsfall mit konstanter Heizleistung weisen sie eine ausgezeichnete Sensitivität auf. Allerdings ist das Ausgangssignal kein...
Micro‐supercapacitors, emerging as promising micro‐energy storage devices, have attracted significant attention due to their unique features. This comprehensive review focuses on two key aspects: the scalable fabrication of MSCs and their diverse applications. The review begins by elucidating the energy storage mechanisms and guiding principles for...
Citations
... This information is pivotal as it directly influences the transducer's efficiency and efficacy. A visualization of these modal patterns, typically the first six modes of vibration, where the modes and frequencies shown in Table 2, can be graphically represented and is often illustrated in technical figures to provide a clear understanding of the CMUT's operational dynamics, as shown in Figure 7 [35][36][37][38][39]. By maintaining a constant membrane thickness and adjusting the membrane radius, we can analyze the resonance frequencies of a CMUT at various radii. ...
Tire pressure monitoring systems (TPMSs) are essential for maintaining driving safety by continuously monitoring critical tire parameters, such as pressure and temperature, in real time during vehicle operation. Among these parameters, tire pressure is the most significant, necessitating the use of highly precise, cost-effective, and energy-efficient sensing technologies. With the rapid advancements in micro-electro-mechanical system (MEMS) technology, modern automotive sensing and monitoring systems increasingly rely on MEMS sensors due to their compact size, low cost, and low power consumption. This study presents a novel high-precision capacitive pressure sensor based on a capacitive micromachined ultrasonic transducer (CMUT) structure and a silicon–silicon direct bonding process. The proposed design offers exceptional performance with high accuracy, ultra-low power consumption, and reduced production costs, making it an optimal solution for enhancing the precision and efficiency of TPMS. Leveraging its low power requirements, capacitive sensing technology emerges as a superior choice for energy-efficient systems in the automotive industry.
... In the realm of ultrasonic transducer technology, piezoelectric crystals, ceramics, and polymers materials have long dominated [1]. In recent years, due to the advancement in microfabrication techniques, the capacitive micromachined ultrasonic transducers (CMUT) have emerged as a competitive technology in this field. ...
... The operation of the proposed transducer can be fully modeled with this tool. In this work, the simulation focuses on the fundamental analysis of a CMUT cell [7] [1]. For this, the modules used are solid mechanics (belonging to the physical study of structural mechanics) and electrostatics (belonging to the AC/DC physical study). ...
This paper introduces a low-tech capacitive micromachined ultrasonic transducer (CMUT) designed with low environmental footprint materials. The fabrication process involves a copper plate as the fixed bottom electrode, a polymer-based adhesive as a dielectric material, and an aluminum foil as the top electrode. Finite element simulations include studies of displacement, mechanical stresses, and eigenfrequency. Experimental measurements validate the device's electromechanical behavior, showing an eigenfrequency of 88.6 kHz and a displacement of 22 pm. The low-tech CMUT demonstrates potential for applications such as ultrasonic actuation and energy harvesting, offering simplicity, biocompatibility, and low environmental impact. While not directly ready for applications, these transducers provide hands-on experience with technology similar to high-performance silicon-based implementations. These low-tech MUTs are perfect practical case studies for teaching purposes, combining simulation and experimental validation.
... Regarding research in the field of computational simulation, most of the studies reviewed focused on the modeling of nanostructured biosensors [13][14][15], showing mathematical models and the results of simulations of the characteristics of the biosensor without specifically mentioning their application in the early detection of diseases. On the other hand, there were studies found on cancer evolution models based on agents and implementing high-performance computing (HPC) [16,17], as well as the progression of melanoma [18], evolution of metastatic processes, tumor angiogenesis [16], treatment response [19,20] and simulation of the adherence of therapeutic particles [21], evidencing efforts that are much more oriented toward the treatment and description of the evolution of CRC, which is oriented toward the early diagnosis of the description of the behavior of biomarkers in a dynamic domain. ...
... The inclusion of elements that were not considered in other investigations [13][14][15][16]21] allowed us to obtain a more adjusted model in terms of the functionality conditions. Some of the results concurred with behaviors that have already been described in other studies, while others enabled us to identify values that did not correspond with the results reported by other authors due to their simplifications. ...
Even though some methods for the detection of colorectal cancer have been used clinically, most of the techniques used do not consider the in situ detection of colorectal cancer (CRC) biomarkers, which would favor in vivo real-time monitoring of the carcinogenesis process and consequent studies of the disease. In order to give a scientific and computational framework ideal for the evaluation of diagnosis techniques based on the early detection of biomarker molecules modeled as spherical particles from the computational point of view, a computational representation of the rectum, stool and biomarker particles was developed. As consequence of the transport of stool, there was a displacement of CRC biomarker particles that entered the system as a result of the cellular apoptosis processes in polyps with a length lower than 1 cm, reaching a maximum velocity of 3.47×10−3 m/s. The biomarkers studied showed trajectories distant to regions of the polyp of origin in 1 min of simulation. The research results show that the biomarker particles for CRC respond to the variations in the movements of the stool with trajectories and speeds that depend on the location of the injury, which will allow locating the regions with the highest possibilities of catching particles through in situ measurement instruments in the future.
... Capacitive pressure sensors measure the capacitance between two or more conductors in a dielectric medium may be air or water. Real world capacitive pressure sensor design includes moving charges, potential surfaces and partially conducting surfaces [15][16][17][18][19][20][21][22][23][24][25][26][27][28][29][30][31][32]. For the accurate calculation of field and current to produce a capacitive pressure sensor, Maxwell equation is used. ...
An innovative technique is explored, aiming to expand the limit of detection (LOD) and increase operating resonant frequency of capacitive micromachined ultrasonic transducer (CMUT) working as a mass sensor through modifying anchor widths. Limit of detection is associated with the concentration range of target compounds and therefore, their correspondent mass that can be measured using a CMUT mass sensor. Poly Multi-User MEMS Process (PolyMUMPs) sacrificial technique is used to fabricate three CMUT sensors with a range of anchor widths while keeping all other sensor design parameters and material properties constant. Experimental analysis is conducted to evaluate the influence of anchor width to resonant frequency and frequency shift at different biasing conditions. The experimental results demonstrates that a larger anchor width can increase CMUT operating resonant frequency and pull-in voltage, allowing for expanded LOD. These results also agree with analytical expressions presented. In addition, it is shown that through employing a designed anchor width, resonant frequencies can be varied to fulfill specific sensor requirements with minimal fabrication adjustments. This study contributes to the evolving knowledge of CMUT as a mass sensor, enabling more methods for variability of these devices.
