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Change in PZRs due to (a) z axis (b) x axis (c) y axis acceleration. (Up and down arrow implies increase and decrease in PZRs respectively)
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... accelerometer is shown in Fig. 3. The accelerometer can sense acceleration along z axis (Fig.3), which is defined as on-axis and the other two axes are defined as off-axis (x and y axis). These PZRs are connected to form a Wheatstone bridge for sensing the acceleration. Change in different resistances for z, x and y axis acceleration are shown in Fig.4 (a), (b), (c) respectively. Each PZR is designed to have a nominal resistance of 1.5kΩ and a PZR sensitivity of 2Ω/g. To obtain 1mv/g sensitivity at 27ºC, I b is set at 250µA. ...
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With the development of MEMS capacitive accelera-tion sensor to a higher measurement range (tens of thousands of g or even hundreds of thousands of g), the failure of the device microstructure under extreme mechanical impact has become a key factor restricting its performance improvement. Existing research mainly focuses on material stress failure...
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... Its variation with MEMS sensor resistance (Fig. 6a) yields an input referred offset (IRO) value (at zero resistance) of ∼2.9 V while exhibiting incremental behavior with increasing sensor resistance. Fig. 6b demonstrates the dependence of the input referred noise spectrum on the MA core sub-blocks where the AZ + CH assisted noise cancellation gives a very low noise floor of ∼45 nV/ √ Hz (at 10 Hz) [37]. The trends seen in percentage relative offset (PRO) and sensitivity (PRS) error over the operating range of temperatures (Fig. 6c) indicate a <1% error in the MEMS sensor output compensation failure by the front-end with the overall amplifier and temperature compensation schemes consuming ∼4 mW in operation. ...
MEMS piezoresistive accelerometers are inertial sensors which measure acceleration of the reference frame to which they are attached. These devices provide extremely localized acceleration-induced stress sensing with low noise outputs and have been the subject of academic as well as commercial research for quite a few years. This chapter deals with the basics micromachined piezoresistive accelerometers, tracing their evolution and typical analyses to sensor fabrication and characterization.
