- Yuriy Kudriavtsev added an answer:Can anyone suggest literature for in depth understanding of sputtering yield?I am working on measurement of differential and total sputtering yield measurement of ceramic material using quartz crystal microbalance (by using ion source). At present I am more inclined towards the fundamental and the theoretical aspects of sputtering yield, so it may be more fruitful in my experimental work.Sputtering by particle bombardment, I-III, edited by R. Behrisch in "Topics in Applied Physics". There are three volumes: I- Sputtering of single-element targets. 1981 II- Sputtering of alloy and compounds. 1983 (Edt. H.H.Andersen) III- Characteristics of Sputtered particles. 1991 A new version of these books was published in 2007 (Edt. Behrisch and Eckstein)Following
- Julien L. Colaux added an answer:Optimum angle (for maximum sputter yield) of incidence from surface normal in ion beam sputtering?I want to know the physical significance of variation sputtering yield at different angle of incidence (w.r.t. ion beam) and also the with fluence and energy of the ion beam.Hi, I also suggest to have a look on the SIMTRA (SImulation of Metal TRAnsport) code developed by Dr Diederik Depla & co at the University of Gent (Belgium). I can't quite remember if the software is open access or not, but you may directly contact D Depla. If you wish to get a bit more information about what this software can do for you, just Google "SIMTRA: a tool to predict and understand deposition". The first link that comes up is a pdf file giving some details about the software.Following
- Vladimir Montero Collado added an answer:How to determine the ion beam diameter from ion source?Can you explain the experimental procedure related.That is basically my second suggestion. Your probe should be small compared to the diameter of the beam. It would be hold by an insulator which must be covered by a sheet of grounded metal to avoid charging. The probe would be connected to an electrometer. If you know the dimensions of the probe you can estimate the current densities if that is the parameter you are interested. If that is the case remember that at the border you start to have only one area of the electrode irradiated so if you divide the current by the whole detector area you would be underestimating your true current density. If it is only the dimension you are interested then pay attention only to the current which will decrease when you arrive to the border and be at the background level once you are out of the beam.Following
About ion thruster
Using an ION beam generated on earth to supply electrical energy above the atmosphere for launch propulsion of super heavy weight, high-energy SpaceShips.