- Chase N Taylor added an answer:Can anyone suggest literature for in depth understanding of sputtering yield?I am working on measurement of differential and total sputtering yield measurement of ceramic material using quartz crystal microbalance (by using ion source). At present I am more inclined towards the fundamental and the theoretical aspects of sputtering yield, so it may be more fruitful in my experimental work.Two essential papers are: 1. Sigmund P. Theory of sputtering. I. Sputtering yield of amorphous and polycrystalline targets. Phys. Rev. APS; 1969;184(2):383. 2. Brandt W, Laubert R. Unified sputtering theory. Nuclear Instruments and Methods. Elsevier; 1967;47(2):201–9.Following
- Andreas Duvenbeck added an answer:Optimum angle (for maximum sputter yield) of incidence from surface normal in ion beam sputtering?I want to know the physical significance of variation sputtering yield at different angle of incidence (w.r.t. ion beam) and also the with fluence and energy of the ion beam.I also suggest to have a look into the book "Sputtering by Particle Bombardment'. In general, you should also keep in mind that the degree of influence of the bombarding angle on the sputtering yields depends on the target. For monocrystalline targets, for instance, you have a significant amount of channeling directions, which lead to a rather deep deposition of kinetic energy and, thus, to reduced yields. This means, that for monocrystalline targets, you will get local minima for the sputtering yield at bombarding angles that correspond to channeling directions.Following
- Vladimir Montero Collado added an answer:How to determine the ion beam diameter from ion source?Can you explain the experimental procedure related.That is basically my second suggestion. Your probe should be small compared to the diameter of the beam. It would be hold by an insulator which must be covered by a sheet of grounded metal to avoid charging. The probe would be connected to an electrometer. If you know the dimensions of the probe you can estimate the current densities if that is the parameter you are interested. If that is the case remember that at the border you start to have only one area of the electrode irradiated so if you divide the current by the whole detector area you would be underestimating your true current density. If it is only the dimension you are interested then pay attention only to the current which will decrease when you arrive to the border and be at the background level once you are out of the beam.Following
About ion thruster
Using an ION beam generated on earth to supply electrical energy above the atmosphere for launch propulsion of super heavy weight, high-energy SpaceShips.