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ABSTRACT: In this work we present a novel MEMS interferometer based on the Mach-Zehnder (MZ) architecture. The interferometer is fabricated by deep reactive ion etching (DRIE) technology on an SOI wafer. The new structure is based on the use of two Si/Air beam splitters and two metallic mirrors, integrated with a comb drive actuator on a single die. The whole structure is integrated on one chip and no parts are assembled from outside the structure. By moving the mirrors using the integrated comb drive actuator, the structure is tested as an FTIR spectrometer. The two wavelengths 1525 nm and 1575 nm have been successfully identified using it.
Design and Test Workshop (IDT), 2009 4th International; 12/2009
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ABSTRACT: A new beam splitter is proposed to realize a completely integrated Michelson interferometer, where a single medium interface (Si/Air) is used for optical beam splitting. This offers a stable splitting ratio over a very wide spectral range. Using this technique on SOI wafers, with a moving mirror, a highly robust and tunable interferometer is fabricated. The tunable interferometer is tested experimentally by measuring optical interference versus mirror displacement.
Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on; 09/2009
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ABSTRACT: A novel optical technique is proposed for the characterization of MEMS resonators. The proposed technique is based on measuring the response of the resonator (resonance frequency and quality factor) optically, which eliminates the electrical parasitic effects. The proposed technique was applied to a comb-drive resonator and the obtained results show good agreement with the standard electrical technique with 2-5% deviation in the resonance frequency and 2-10% in the quality factor. I. SUMMARY omb drive actuators are essential elements in many MEMS applications such as in sensors or telecommunication fields [1-2]. They have been extensively studied in the last years where different actuators designs have been implemented in inertial as well as optical applications [3-4]. However, the characterization of MEMS comb actuators is a field that needs much more elaboration to overcome the parasitic effects, usually masking the intrinsic resonator performance [5]. On the characterization level, two parameters are usually required to extract the comb equivalent circuit, the resonance frequency and the damping ratio (or the quality factor). When measuring these parameters using standard electrical techniques (such as frequency sweeping or time domain response) we are usually suffering from the interference of the parasitic elements on the measurement results. In addition, in electrical characterization we measure the equivalent impedance without direct access to the comb displacement (which is the main output of the actuator). The proposed technique is based on applying a voltage step on the comb-drive resonator and measuring the reflected optical power from a moving mirror driven by the comb (and connected to it) as shown in Fig. 1. In this case, the damped mechanical oscillations of the comb-drive are translated to equivalent damped oscillations in the sensed optical power. The resonance frequency and the quality factor can thus be obtained by fitting the measured optical power to the theoretically estimated one. A MEMS resonator operating in one-port configuration has an equivalent electrical circuit that consists of two branches in parallel [6]. One of them is the series
International Conference on Optical MEMS and Nanophotonics; 08/2009
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ABSTRACT: In this paper, we propose a compact integrated InGaAsP/InP polarization controller circuit. The proposed circuit transforms any incoming state of polarization (SOP) to any required SOP. It consists of two polarization beam splitters/ combiners, two polarization converters, a tunable power coupler, and a phase shifter, which are integrated on a single chip. The controller size is 6000 mum times 9.7 mum. Optical characteristics of the controller are evaluated by computer simulation using a 3-D full-vectorial beam propagation method. Simulation results show that the insertion loss is less than 3.2 dB, and the extinction ratio is more than -22 dB for the wavelength range from 1.53 to 1.56 mum.
Journal of Lightwave Technology 10/2007; · 2.78 Impact Factor
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ABSTRACT: We present an approximate semianalytical technique for the calculation of the loss coefficient of leaky modes in 3-D hollow dielectric waveguides having an arbitrary cross section. The hollow waveguides are assumed to have an axis of symmetry and to have a cladding with a higher refractive index than the core. An expression for the modal loss coefficient is derived using a ray-optics approach with paraxial approximation. For the special cases of specific cross sections with known solutions, our technique gives results that are identical to the available analytical solutions. The technique is then applied on practical waveguide geometries, allowing the calculation of polarization- and wavelength-dependent losses. Full numerical alternatives to the technique involve time-consuming simulations and, sometimes, difficulty in incorporating a suitable boundary condition to obtain leaky-mode solutions.
Journal of Lightwave Technology 10/2007; 25(9):2337-2344. · 2.78 Impact Factor
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ABSTRACT: In this work, a genetic algorithm is used for the optimization of the design parameters of an integrated optical polarization converter on a glass substrate. The algorithm is applied to find the minimum possible length for the converter. The required asymmetry for the structure is realized with the aid of a cleaving process following the ion-exchange process. Simulation results show the possibility of realizing such a low-cost integrated converter. The obtained results demonstrate the importance of using such an algorithm in integrated optics problems where several design parameters such as the geometrical dimensions, the temperature, and the time duration are to be optimized.
IEEE Photonics Technology Letters 09/2007; · 2.19 Impact Factor
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ABSTRACT: A new integrated optical triplexer based on asymmetric Y-junction with etched branch is proposed and investigated theoretically. The proposed structure uses the ionic exchange technology on a glass substrate with hydrofluoric etching. The proposed triplexer is designed to demultiplex 1310, 1490, and 1550 nm for fiber-to-the-home application with insertion loss less than 1 dB, crosstalk better than 25 dB, high extinction ratio, and wide bandwidth.
IEEE Photonics Technology Letters 09/2007; · 2.19 Impact Factor
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ABSTRACT: A novel advanced deep reactive ion etching (DRIE) process technique is used to realize highly efficient vertical Bragg mirrors. The Bragg mirrors are realized by anisotropic etching of Si using DRIE, thus producing successive vertical interfaces between Si and air. The new etching technique is based on combining 2 steps of cryogenic and Bosch DRIE processes to obtain high quality Si walls in terms of both: high aspect ratio vertical walls as well as smooth surface. The realized Bragg mirrors, fabrication process, as well as measured optical performance showing the advantages of the new technique are presented
MEMS, NANO and Smart Systems, The 2006 International Conference on; 01/2007
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ABSTRACT: Vertical Bragg grating mirrors are realized by the anisotropic etching of Si using deep reactive ion etching (DRIE), thus producing multiple vertical interfaces between Si and air. The Bragg mirrors are used to realize two optical filter configurations. The first is a tunable Fabry–Pérot cavity composed of two mirrors, where tuning is achieved by moving one of the mirrors using silicon-on-insulator (SOI) electrostatic microelectromechanical system (MEMS) actuation. The second is a drop filter, where a tilted Bragg mirror acts as a wavelength selective reflector. The enhanced etching process involving a mix of cryogenic and Bosch DRIE processes is presented. The realized structures, fabrication process, as well as measured performance are also presented.
IEEE Journal of Selected Topics in Quantum Electronics 12/2006; 12(6):1480-1488. · 3.78 Impact Factor
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ABSTRACT: A three dimensional free-space optical library is developed and implemented using C language inside a SPICE simulator for accurate and realistic co-simulation with electronic and electromechanical elements. A parametric, transient, and Monte-Carlo simulation of a 2times2 optical switch is demonstrated using this library
Behavioral Modeling and Simulation Workshop, Proceedings of the 2006 IEEE International; 10/2006
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ABSTRACT: A Michelson interferometer utilizing silicon Bragg reflectors is presented for the first time. The Bragg mirrors as well as the beam splitter are all realized at the same DRIE step, and occupy an area of 150 mumtimes150 mum. To the best of the authors' knowledge this the smallest reported foot print of the interferometer. The fabricated interferometer and measured characteristics are presented
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on; 09/2006
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ABSTRACT: A tunable Fabry-Perot cavity composed of two Bragg mirrors is realized using enhanced deep reactive ion etching (DRIE) process. Filter tuning is achieved by moving one of the mirrors using a high resolution electrostatic actuator over SOI. Measured filter response in C&L bands is presented
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on; 09/2006
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ABSTRACT: Integrated in-line polarizers based on hollow waveguide with multilayer sidewalls compatible with MEMS technology are proposed. The proposed design of 4 layers can achieve an extinction ratio of 11 dB/mm with propagation loss of 0.9 DB/mm.
Group IV Photonics, 2005. 2nd IEEE International Conference on; 10/2005
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ABSTRACT: In this paper, design and measurement results of a test chip that intends to evaluate differences between layout techniques for rectangular unit-capacitor arrays are introduced. Precision capacitor ratios are compared using a switched-capacitor biquad and a pseudo-floating gate configuration. The test chip is used to evaluate the effectiveness of an automatic common-centroid capacitor array generation tool with arbitrary capacitor ratios. Results indicate significant improvements in ratio accuracy, which have a direct impact on a wide range of applications such as filters for wireless communications, hard drives, and high precision baseband processing.
Quality of Electronic Design, 2005. ISQED 2005. Sixth International Symposium on; 04/2005
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ABSTRACT: In this paper, we present a three-dimensional multimode interference phased array structures (3-D MMI PHASAR) (de)multiplexer as a multilevel extension to the planar two-dimensional (2-D) MMI PHASAR. This device is compatible with the planar integrated optics technology. This opens the route for new high-density multilevel optical circuits. In this paper, we discuss 3-D integrated optics and give a detailed description of this new device. The demultiplexing of 65 dense wavelength division multiplexing (DWDM) channels with a channel spacing of 0.2 nm using the proposed structure is considered. The comparison with a 2-D planar PHASAR shows a net improvement in the structure compactness and performance.
IEEE Journal of Selected Topics in Quantum Electronics 04/2005; · 3.78 Impact Factor
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ABSTRACT: We developed a statistical Monte Carlo technique for the performance estimation of optical microelectromechanical systems (MEMS) components taking into account the randomness nature of its assembly. The developed technique is applied on the 2×2 moving mirror optical MEMS switch as a typical example to study its performance under realistic passive-alignment conditions. The obtained results enable us to evaluate the assembly process capability and to analyze the performance sensitivity to different fabrication parameters. This enables us to establish a design for manufacturability technique for the optical MEMS components.
Journal of Lightwave Technology 03/2005; 23(2):510- 516. · 2.78 Impact Factor
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Electrical, Electronic and Computer Engineering, 2004. ICEEC '04. 2004 International Conference on; 10/2004
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Electrical, Electronic and Computer Engineering, 2004. ICEEC '04. 2004 International Conference on; 10/2004
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ABSTRACT: In this work, we investigate the multiple-imaging in two-dimensional (2-D) multimode silicon Hollow waveguides. Two waveguides with dimensions 40×80 μm<sup>2</sup> and 80×80 μm<sup>2</sup> are fabricated using microelectromechanical system compatible technology and measured at 675 nm. The multiple-imaging in the 2-D transverse plane is reported, and the measured imaging lengths agree with the theoretical predictions.
IEEE Photonics Technology Letters 10/2004; · 2.19 Impact Factor
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ABSTRACT: In this work we present a new structure based on the use of hollow dielectric waveguides as the guiding medium between the switch nodes (mirrors) for the N×N optical cross connect switch. The hollow waveguides are designed and fabricated by deep reactive ion etching (DRIE) on SOI wafers. The optical performance, measured at the 1550 nm shows propagation loss lower than 0.08dB/mm, a polarization dependant loss PDL less than 0.15 dB and a wavelength dependant loss WDL less than 0.152 dB.
Photonics and Its Application, 2004. The Fourth Workshop on; 06/2004
