H. Fiedorowicz

Publications (42)62.79 Total impact

• Article: Combined effect of EUV irradiation and acetone treatment on PET surface

  A. Bartnik, H. Fiedorowicz, S. Burdyńska, R. Jarocki, J. Kostecki, M. Szczurek
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  ABSTRACT: In this work, the radiation from a laser-plasma extreme ultraviolet (EUV) source based on a double-stream gas-puff target was used for surface modification of polyethylene terephthalate (PET). The spectrum of the wide band radiation focused with a gold-coated ellipsoidal collector consisted of a narrow feature with maximum at 10nm and a long-wavelength tail up to 70nm. The PET samples were mounted in the focal plane of the EUV collector or at some distance downstream this plane and irradiated for 0.1s–2min with 10-Hz repetition rate. The polymer samples after irradiation were rinsed in acetone. Surface morphologies of the PET samples after irradiation were investigated using a scanning electron microscope and atomic force microscope. Different kinds of surface micro- and nanostructures were created as a result of irradiation depending on the EUV fluence and number of pulses. Acetone treatment of the polymer samples after irradiation resulted in formation of additional nanostructures. In this case the nanostructures were revealed even after exposure with a single EUV pulse.
  Applied Physics A 05/2012; 103(1):173-178. · 1.63 Impact Factor
• Article: Ablation and surface modifications of PMMA using a laser-plasma EUV source

  A. Bartnik, H. Fiedorowicz, R. Jarocki, J. Kostecki, A. Szczurek, M. Szczurek
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  ABSTRACT: Surface modification and micro-structuring of polymers for different application is mainly performed using ultraviolet (UV) radiation from excimer lamps or excimer lasers. In this case, however, the radiation penetration depth may exceed 100μm, thereby degrading the polymer deep inside. On the other hand, extreme ultraviolet (EUV) radiation is absorbed in a layer approximately 100 nm thick only. In this work, the radiation from a laser-plasma EUV source based on a double-stream gas-puff target is focused with a gold-coated ellipsoidal collector for surface modification of polymethylmethacrylate (PMMA). The spectrum of the focused radiation consists of a narrow feature with maximum at 10 nm and a long-wavelength tail up to 70 nm. The PMMA samples are mounted in the focal plane of the EUV collector or at some distance downstream this plane and irradiated for 10–60 s with 10-Hz repetition rate. The irradiated polymer samples were investigated using a scanning electron microscope. When the EUV fluence exceeds 10 mJ/cm2, smooth ablation of PMMA was obtained. For lower fluences but close to this value, strong surface modifications appeared.
  Applied Physics B 05/2012; 96(4):727-730. · 2.19 Impact Factor
• Article: Laser-produced plasma EUV source based on tin-rich, thin-layer targets

  R. Rakowski, J. Mikołajczyk, A. Bartnik, H. Fiedorowicz, F. de Gaufridy de Dortan, R. Jarocki, J. Kostecki, M. Szczurek, P. Wachulak
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  ABSTRACT: In this paper a new approach to a laser-produced plasma EUV source based on a tin target is presented. Athin layer of pure tin and composite layers consisting of Sn with Si, SiO and LiF are investigated. The target composed of several thin layers produces less debris than the other targets and provides a conversion efficiency (CE) in the 13.5-nm±1% band at least comparable to the CE for the pure tin slab target. The largest CE was observed for the target composed of a mixture of Sn and LiF, due to the fact that lithium, similarly to tin, is a strong emitter at 13.5nm.
  Applied Physics B 04/2012; 102(3):559-567. · 2.19 Impact Factor
• Article: EUV emission from solids illuminated with a laser-plasma EUV source

  A. Bartnik, H. Fiedorowicz, R. Jarocki, J. Kostecki, R. Rakowski, M. Szczurek
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  ABSTRACT: In this paper a possibility of performing fluorescence experiments in extreme ultraviolet (EUV) using a laboratory EUV source was demonstrated. Usually such measurements are performed using third-generation synchrotrons because of extremely low probability of fluorescence in this wavelength range. In this work a 10Hz laser-plasma EUV source based on a gas puff target was used. Fluorescent radiation from Al and Si was registered. Despite relatively low spectral resolution, some differences in Si spectra coming from different kind of samples were revealed.
  Applied Physics B 04/2012; 93(4):737-741. · 2.19 Impact Factor
• Article: Physical and chemical modifications of PET surface using a laser-plasma EUV source

  A. Bartnik, H. Fiedorowicz, R. Jarocki, J. Kostecki, M. Szczurek, A. Biliński, O. Chernyayeva, J. W. Sobczak
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  ABSTRACT: Extreme ultraviolet (EUV) radiation is the electromagnetic radiation ranging from vacuum ultraviolet to soft X-rays. Asingle EUV photon carries enough energy to ionize any atom or molecule. The penetration depth of the radiation in any material is very short, ranging from tens to hundreds nanometers. Intense EUV pulses can remove material from the surface or modify its morphology or/and chemical structure. In this work, the radiation from a laser-plasma EUV source based on a double-stream gas-puff target was used for surface modification of polyethylene terephthalate (PET). The PET samples were irradiated with the EUV pulses emitted from krypton plasma and focused with a gold-plated ellipsoidal collector. The spectrum of the focused radiation covered the wavelength range from 9 to 70nm. The PET samples were irradiated for 1s–2min at a 10-Hz repetition rate. Surface morphology of polymer samples after irradiation was investigated using a scanning electron microscope. Changes in chemical surface structure of the irradiated samples were investigated using an X-ray photoelectron spectroscopy. Different kinds of surface microstructures were obtained depending on the EUV fluence in a single pulse and the total EUV fluence. XPS measurements also revealed a modification of the chemical structure.
  Applied Physics A 04/2012; 99(4):831-836. · 1.63 Impact Factor
• Article: A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength

  P. W. Wachulak, A. Bartnik, H. Fiedorowicz, T. Feigl, R. Jarocki, J. Kostecki, R. Rakowski, P. Rudawski, M. Sawicka, M. Szczurek, A. Szczurek, Z. Zawadzki
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  ABSTRACT: A compact, high-repetition table-top EUV source, based on a gas-puff target, is presented. This source was developed in our group and is capable of emitting quasi-monochromatic radiation at 13.8nm wavelength with the inverse relative bandwidth of 140 and pulse energies up to ∼1.3μJ/pulse at 10-Hz repetition rate. The source is debris-free, operates near the lithographic wavelengths and offers the energy density of ∼0.4mJ/cm2 in each EUV pulse. These three features make the source attractive for lithographic experiments. The timing optimization of the source, its energy per pulse, spectral and spatial distributions are pointed out in detail as well as the enhancement in energy density achievable with a multi-layer collector mirror compared to a planar mirror of equal reflectivity.
  Applied Physics B 04/2012; 100(3):461-469. · 2.19 Impact Factor
• Article: Characterization and optimization of the laser-produced plasma EUV source at 13.5 nm based on a double-stream Xe/He gas puff target

  R. Rakowski, A. Bartnik, H. Fiedorowicz, F. de Gaufridy de Dortan, R. Jarocki, J. Kostecki, J. Mikołajczyk, L. Ryć, M. Szczurek, P. Wachulak
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  ABSTRACT: The paper describes a debris-free, efficient laser-produced plasma source emitting EUV radiation. The source is based on a double-stream Xe/He gas-puff. Its properties and spectroscopic signatures are characterized and discussed. The spatio-spectral features of the EUV emission are investigated. We show a large body of results related to the intensity and brightness of the EUV emission, its spatial, temporal, and angular behavior and the effect of the repetition rate as well. A conversion efficiency of laser energy into EUV in-band energy at 13.5 nm of 0.42% has been gained. The electron temperature and electron density of the source were estimated by means of a novel method using the FLY code. The experimental data and the Hullac code calculations are compared and discussed. The source is well suited for EUV metrology purposes. The potential of the source for application in EUV lithography was earlier demonstrated in the optical characterization of Mo/Si multi-layer mirrors and photo-etching of polymers.
  Applied Physics B 04/2012; 101(4):773-789. · 2.19 Impact Factor
• Source

  Available from: icm.edu.pl

  Article: Nanometer-Scale Incoherent Imaging Using Laser-Plasma EUV Source

  P W Wachulak, A Bartnik, H Fiedorowicz, J Kostecki
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  ABSTRACT: Various imaging methods and techniques capable of reaching a nanometer spatial resolution are currently under development. One of them is an extreme ultraviolet microscopy, based on the Fresnel zone plates. In this paper a compact, high-repetition, laser-plasma EUV source, with a gas puff target, capable of emitting quasi-monochromatic radiation at 13.8 nm wavelength was used in the first demonstration of a desk-top EUV transmission microscopy with a spatial (half-pitch) resolution of 50 nm. EUV microscopy images of objects with various thicknesses and the spatial resolution measurements using the knife-edge test are presented.
  04/2012; 121(42).
• Article: EUV-induced physico-chemical changes in near-surface layers of polymers

  A. Bartnik, H. Fiedorowicz, R. Jarocki, J. Kostecki, M. Szczurek, O. Chernyayeva, J.W. Sobczak
  Journal of Electron Spectroscopy and Related Phenomena 01/2011; 184:270-275. · 1.96 Impact Factor
• Article: “Water window” compact, table-top laser plasma soft X-ray sources based on a gas puff target

  P. W. Wachulak, A. Bartnik, H. Fiedorowicz, P. Rudawski, R. Jarocki, J. Kostecki, M. Szczurek
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  ABSTRACT: We have developed compact, high repetition, table-top soft-X-ray sources, based on a gas puff target, emitting in “water window” spectral range at λ = 2.88 nm from nitrogen gas target or, in 2-4 nm range of wavelengths, from argon gas target. Double stream gas puff target was pumped optically by commercial Nd:YAG laser, energy 0.74 J, pulse time duration 4 ns. Spatial distribution of laser-produced plasma was imaged using a pinhole camera. Using transmission grating spectrometer, argon and nitrogen emission spectra were obtained, showing strong emission in the “water window” spectral range. Using AXUV100 detector the flux measurements of the soft-X-ray pulses were carried out and are presented. These debris free sources are table-top alternative for free electron lasers and synchrotron installations. They can be successfully employed in microscopy, spectroscopy and metrology experiments among others.
  Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms 04/2010; 268:1692-1700. · 1.21 Impact Factor
• Article: Interaction of laser radiation with a dense gas target

  A Bartnik, V M Dyakin, I Yu Skobelev, A Ya Faenov, H Fiedorowicz, M Szczurek
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  ABSTRACT: An investigation was made of the interaction of a nanosecond laser pulse with a 'puff' gas target at gas densities sufficient for the formation of a critical-density plasma. The parameters of the laser plasma formed in the central interaction region and at its periphery were determined by x-ray spectroscopic methods. The formation of a plasma channel was observed and it was attributed to self-focusing of the laser radiation in the ionised gas.
  Quantum Electronics 10/2007; 27(1):68. · 0.83 Impact Factor
• Article: Investigation of an x-ray source based on a gas puff heated by laser radiation

  A Bartnik, V M Dyakin, P Parys, I Yu Skobelev, A Ya Faenov, H Fiedorowicz, S Ya Khakhalin
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  ABSTRACT: An investigation was made of a plasma formed by heating a gas target with neodymium gas laser radiation of ~15 GW power. The working substance was gaseous SF6. The x-ray emission spectra of sulfur and fluorine ions were investigated with one- and two-dimensional spatial resolution. These spectra were recorded by a high-resolution high-luminosity spectrograph with a mica crystal bent to form a sphere with a radius of R = 10 cm. Laser breakdown of a gas puff produced a sufficiently compact near-spherical plasma formation of ~2.5 mm size and with the electron temperature at least 470 eV.
  Quantum Electronics 10/2007; 25(1):19. · 0.83 Impact Factor
• Article: Precision measurements of the wavelengths of spectral lines of multiply charged krypton and argon ions formed in a gas target heated by laser radiation

  V M Dyakin, I Yu Skobelev, A Ya Faenov, A Bartnik, H Fiedorowicz, M Szczurek, A Osterheld, J Nilsen
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  ABSTRACT: The first precision (with an error of 0.4–1.6 mÅ) measurements were made of the wavelengths of x-ray spectral lines emitted as a result of n=4 — n'=2 transitions in the Ne- and Na-like Kr XXVII and Kr XXVI ions. The spectra were recorded by means of a spectrograph with a spherically bent mica crystal, characterised by a spectral resolution λ/Δλ ≈ 5 × 103. The dispersion characteristic of this crystal was determined with the aid of reference lines, which were emitted by the He-like Ar XVII ion. The wavelengths of a series of dielectronic satellites of the resonance line of the Ar XVII ion were identified and measured. The results obtained were compared with calculated data.
  Quantum Electronics 10/2007; 27(8):691. · 0.83 Impact Factor
• Chapter: Overview of Tabletop X-Ray Laser Development at the Lawrence Livermore National Laboratory

  J. Dunn, V. N. Shlyaptsev, J. Nilsen, R. F. Smith, R. Keenan, S. J. Moon, J. Filevich, J. Rocca, A. J. Nelson, J. R. Hunter, [......], A. L. Osterheld, R. Shepherd, H. Fiedorowicz, A. Bartnik, A. Ya. Faenov, T.A. Pikuz, P. Zeitoun, S. Hubert, S. Jacquemot, M. Fajardo
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  ABSTRACT: It is almost a decade since the first tabletop x-ray laser experiments were implemented at the Lawrence Livermore National Laboratory (LLNL). The decision to pursue the picosecond-driven schemes at LLNL was largely based around the early demonstration of the tabletop Ne-like Ti x-ray laser at the Max Born Institute (MBI) as well as the established robustness of collisional excitation schemes. These picosecond x-ray lasers have been a strong growth area for x-ray laser research. Rapid progress in source development and characterization has achieved ultrahigh peak brightness rivaling the previous activities on the larger facilities. Various picosecond soft-x-ray based applications have benefited from the increased repetition rates. We will describe the activities at LLNL in this area.
  12/2006: pages 1-11;
• Article: The dielectronic satellites to the 2s-3p Ne-like krypton resonance lines

  S Ya Khakhalin, V M Dyakin, A Ya Faenov, H Fiedorowicz, A Bartnik, P Parys, J Nilsen, A Osterheld
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  ABSTRACT: We present an analysis of dielectronic satellite spectra of 2p6-2s2p63p Ne-like krypton resonance lines. The satellite structure was registered with high (better than λ/Δλ > 3500) spectral resolution in the emission of a laser irradiated gas puff target. We perform an unambiguous identification of satellite lines caused by radiative transitions from autoionizing states of sodium-like krypton ions. A total of about 20 spectral features are identified, most of them for the first time. Very good agreement between the satellite structure calculations and experimental emission spectra is obtained.
  Physica Scripta 08/2006; 50(2):106. · 1.20 Impact Factor
• Article: Strong temperature effect on X-ray photo-etching of polytetrafluoroethylene using a 10 Hz laser-plasma radiation source based on a gas puff target

  A. Bartnik, H. Fiedorowicz, R. Jarocki, L. Juha, J. Kostecki, R. Rakowski, M. Szczurek
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  ABSTRACT: The first results of experiments on direct photo-etching of heated PTFE using a 10Hz X-ray source based on a laser-irradiated gas puff target are presented. X-ray radiation in the wavelength range from 6to 20nm was produced as a result of irradiation of a double-stream gas puff target with Nd:YAG laser pulses of energy 0.8J and time duration 3ns. The resulting X-ray pulses with energy of about 100–200mJ were used to irradiate samples of PTFE to create microstructures by direct photo-etching. Strong enhancement of the photo-etching process was observed for samples heated up to 300C.
  Applied Physics B 02/2006; 82(4):529-532. · 2.19 Impact Factor
• Source

  Available from: pan.pl

  Article: X-ray laser emission from a laser-irradiated gas puff target

  H Fiedorowicz, A Bartnik
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  ABSTRACT: The paper describes the research on soft X-ray lasers with an active medium created using a gas puff target irradiated with high-intensity laser pulses. The gas puff target in a form of an elongated gas sheet is produced by pulsed injection of gas through a slit nozzle using a high-pressure electromagnetic valve. The method of generation of soft X-ray lasers using a laser-irradiated gas puff target has been developed at the Institute of Optoelectronics. The collaborative experiments were performed at various laser laboratories using high-intensity laser systems to irradiate the gas puff target and pump the X-ray laser active medium. Results of these experiments are presented and discussed. Works aimed at increasing the efficiency of X-ray lasers using a longitudinally irradiated gas puff target are also reviewed.
  Bulletin of the Polish Academy of Sciences, Technical Sciences 01/2005; 53. · 0.97 Impact Factor
• Source

  Available from: Valer Tosa

  Article: Bright high-order harmonic generation from long gas jets toward coherent soft X-ray applications

  H.T. Kim, I.J. Kim, V. Tosa, C.M. Kim, J.J. Park, Y.S. Lee, A. Bartnik, H. Fiedorowicz, C.H. Nam
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  ABSTRACT: We have performed the optimization of high-order harmonic brightness from long gas jets by using self-guided and chirped femtosecond laser pulses and analyzed their coherence properties. The characteristics of laser pulse propagation were analyzed both in theory and in experiments to understand the self-guiding process of laser pulses and chirp compensation mechanism. Highly efficient harmonic generation with low beam divergence and narrow bandwidth was achieved by applying these two techniques to the long gas jets. The coherence properties of the bright harmonics were examined using double-pinhole interference and spectral interference.
  IEEE Journal of Selected Topics in Quantum Electronics 12/2004; · 3.78 Impact Factor
• Article: Micromachining of organic polymers by direct photo-etching using a laser plasma X-ray source

  H. Fiedorowicz, A. Bartnik, M. Bittner, L. Juha, J. Krasa, P. Kubat, J. Mikolajczyk, R. Rakowski
  Microelectronic Engineering 01/2004; 73-74:336-339. · 1.56 Impact Factor
• Conference Proceeding: Ablation of organic polymers by direct exposure to radiation from a laser plamsa X-ray source

  H. Fiedorowicz, A. Bartnik, L. Juha, J. Krasa, P. Kubat, J. Mikolajczyk, R. Rakowski
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  ABSTRACT: In this paper, we present the first experiments on direct photo-etching of organic polymers using a laser plasma x-ray source based on a laser-irradiated gas puff target.
  Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International; 11/2003