ABSTRACT: Niobium nitride superconducting films have been deposited by reactive rf magnetron sputtering. Polyepitaxial growth on MgO-coated substrates greatly improves the superconducting properties. The overall film resistivity is found to be widely dependent on the total pressure of the gas mixture. Samples with a negative temperature coefficient of resistance exhibit 3D weak localization effects as characterized by magnetoresistance measurements. The inelastic scattering time is found to vary as T–p with p2, in the temperature range Tc-3Tc.
Journal of Low Temperature Physics 12/1989; 78(1):63-77. · 1.19 Impact Factor