Publications (4)3.63 Total impact
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Conference Proceeding: Photoluminescence and electron-spin-resonance studies of defects inamorphous SiO<sub>2</sub> films
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ABSTRACT: The purpose of this paper is to characterize the point defects in a-SiO<sub>2</sub> films including thermal a-SiO<sub>2</sub> and those prepared by the PE-CVD and SIMOX techniques. Particular emphasis is placed on the results of PL and ESR in thermal a-SiO<sub>2</sub> films implanted with B or P ions. The PL decay characteristics are also compared with those observed for other types of a-SiO<sub>2</sub> prepared by the PE-CVD and SIMOX techniquesElectrical Insulating Materials, 1998. Proceedings of 1998 International Symposium on; 10/1998 -
Article: Radiation effects and surface deformation of silica by ion microbeam
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ABSTRACT: Radiation effects induced by ion microbeam were studied by a confocal microspectroscopy and an atomic force microscopy (AFM). We investigate two significant radiation effects, defect generation and compaction, which were ascribed to electronic (Eelec) and nuclear stopping powers (Enucl), respectively. Photoluminescence mapping of nonbridging oxygen hole centers at 650 nm reveals the defect formation along the tracks of ions. The surface deformation measured by AFM depends on the width of irradiated by microbeam. Confinement effects from the interface of irradiated and nonirradiated regions are taken into account for the understanding of the correlation between the surface deformations and internal compactions.Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms 191:342-345. · 1.21 Impact Factor -
Article: Characterization of refractive index changes of silica glass induced by ion microbeam
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ABSTRACT: Distributions of structural and refractive index changes of silica irradiated by H+ microbeam were studied by optical and atomic force microscopes (AFM). The AFM measurements on the microbeam irradiated area show the formation of a groove on the surface. In addition, a cross sectional observation on the surface parallel to the incident plane reveals surface deformation along the ion tracks, which is deepest at the projected range of ions. Taking into account the possible structural changes of silica induced by energy deposition calculated by TRIM, the measured topological changes at the front and side surfaces result from internal compaction of silica glass. Refractive index changes were estimated from the Lorentz–Lorenz relationship using the distribution of the internal compaction estimated by the AFM measurements.Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms 210:272-276. · 1.21 Impact Factor -
Article: Characterization of ion-implanted silica glass by micro-photoluminescence and Raman spectroscopy
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ABSTRACT: We evaluated structural changes in silica glass induced by ion microbeam using microscopic photoluminescence (PL) and Raman scattering measurements. Microbeams (1.7 MeV H+) were scanned over the sharp right-edges of the silica substrates with a fluence of 1×1017 cm−2, then two PL bands of silica at 540 and 650 nm were observed at the irradiated region. The PL bands show different lateral and depth distributions. The distribution of the 540 nm PL is in good agreement with that of the refractive index changed region. The lateral distribution of the 650 nm band is broader by 1.5 times than those of the 540 nm PL and the refractive index changed region. The microscopic Raman scattering measurements show an increased intensity of 606 cm−1 peak associated with compaction at the microbeam irradiated regions.Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms 210:277-280. · 1.21 Impact Factor
