Reza Bavadi

Islamic Azad University, Teheran, Tehrān, Iran

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Publications (2)2 Total impact

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    ABSTRACT: The morphological parameter of a thin film surface can be characterized by power spectral density (PSD) functions which provide a better description to the topography than the root mean square roughness and imparts several useful information of the surface including fractal and superstructure contributions. In the present work PSD spectra computed from atomic force microscopy (AFM) data were used for studying the morphology of three different titanium nitride thin films obtained by dc magnetron sputtering system. The power values of PSD for the AFM data were determined by the fast Fourier transforms algorithms. We investigate the effect of substrate temperature and crystallite sizes on the roughness of thin films surface.
    Journal of Fusion Energy 12/2012; 31(6). · 1.00 Impact Factor
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    ABSTRACT: The TiN thin films were deposited on p-type silicon (100) substrates using reactive planar DC magnetron sputtering system. The target was 99.99% pure Ti. The reactive sputter gas was a mixture of Ar (99.999%) and N2 (99.999%) with the ratio Ar (97%) and N2 (3%) by volume. Structural characterization of the coating was done using X-ray diffraction (XRD). The surface roughness of the coating was determined using an Atomic Force Microscope (AFM). The reflectivity of thin films was investigated by a spectrophotometer system. The X-ray diffraction measurements showed that by increasing the substrate temperature during the growth, change in crystalline structure will occur. The crystallite size of the films determined by Scherrer’s equation, and the crystallite size measured by AFM also increased by increasing the substrate growth temperature. The surface reflectivity measurements indicate that by increasing the substrate growth temperature, the optical properties of the films changes. The change in optical properties and crystalline structure of the films indicate that substrate growth temperature plays an important role in structure and morphology of the grown layers. KeywordsDC magnetron sputtering–Titanium nitride compound–Substrate temperature
    Journal of Fusion Energy 03/2011; 30(4):333-337. · 1.00 Impact Factor