Kaiming Yang

Tsinghua University, Peping, Beijing, China

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Publications (10)10.23 Total impact

  • Yu Zhu, Chuxiong Hu, Jinchun Hu, Kaiming Yang
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    ABSTRACT: Departing from previous complicated attempts, this paper studies the self-calibration of 2-D precision metrology stages seriously from an accuracy- and simplicity-oriented perspective. Based on three measurement views with different permutations of an artifact plate on the metrology stage, symmetry, transitivity, and redundance are obtained and utilized to exactly extract the stage error from the measurement data. Particularly, as the determination of the misalignment-error components of the translation measurement view is rather complicated but important in previous research studies, the proposed scheme does not need this costly computation, which significantly simplifies the calculation process. The algorithm is tested by computer simulation, and the results validate that the proposed method can exactly realize the stage error even under the existence of various random measurement noises. The procedure for performing a standard 2-D self-calibration following the proposed scheme is finally introduced for engineers in practical implementations.
    IEEE Transactions on Industrial Electronics 01/2013; 60(6):2264-2272. · 6.50 Impact Factor
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    ABSTRACT: The research in the present paper focuses on decoupling the six-degrees-of-freedom motions of a magnetically levitated stage with moving coils and controlling the levitation motion. The decoupling is based on commutation of coil array, which is obtained reversely from the electromagnetic force/torque model of the stage. The control of levitation motion is carried out by a phase lead-lag controller designed on the criterion of minimum integral of time-weighted absolute error after gravity compensation modeling of the plant dynamics. Comprehensive simulations of the control system in MATLAB/Simulink and real levitation experiments on a digital signal processor-centered test platform are made to verify the six-degrees-of-freedom decoupling effect and the closed-loop control performances of the levitation degree of freedom. The results indicate that the six-degrees-of-freedom motions of the stage can be decoupled through coil array commutation and the levitation motion can be controlled by the phase lead-lag controller based on the gravity compensation model and designed on the criterion of minimum integral of time-weighted absolute error.
    Journal of systems and control engineering. 10/2012; 226(7):875-886.
  • Leqing Cui, Kaiming Yang, Yu Zhu, Xin Li, Dongdong Yu
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    ABSTRACT: Physical interpretation on anti-resonance in two systems with mechanical flexibilities is presented. It is shown that the anti-resonance is caused by two modes with opposite coefficients determined by the location of actuator and sensor. Notch-type filters are discussed with their physical meaning to compensate the resonance and anti-resonance. It is validated by simulation that for system with non-colocation in the measuring point and working point, compensating resonance would improve the control quality while compensating anti-resonance would not.
    Proceedings of the 2012 Second International Conference on Electric Information and Control Engineering - Volume 02; 04/2012
  • Dongdong Yu, Kaiming Yang, Yu Zhu, Xin Li, Leqing Cui
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    ABSTRACT: Recently the manufacturing industry has seen increasing demand for micro-components in biomedical, opto-mechatronics, and automotive applications. In particular, a positioning table system combining high accuracy with high speed over large travel ranges. However, the traditional stage constructed by stacking one-axis stages to achieve multiple degrees of freedom motion, are no longer a viable solution to meet the tighter tolerances required by the customers. In order to meet these demands simultaneously, the paper proposes an aerostatic X-Y planar motion stage featuring high resolution (80nm), long stroke, non-contact moving, lightweight and compact structure. It employs a slider consisting of four three-phase coils, which can move along the surface of a standard hal bach permanent magnetic array in a non-contact condition due to being elevated with air bearing. Furthermore, control system is designed including feedback and feed forward controllers. To further improve the tracking performance and eliminating recurrent disturbances, iterative learning control is employed. Performance evaluation results show that the developed planar motion stage can realize a remarkable performance which includes fast settling time and micrometer positioning with high speed over large ranges.
    Proceedings of the 2012 Second International Conference on Electric Information and Control Engineering - Volume 02; 04/2012
  • Leqing Cui, Yu Zhu, Kaiming Yang, Xin Li, Dongdong Yu
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    ABSTRACT: A lumped parameter model (LPM) is presented to model and analyze the main modes of an ultra-precision stage. The modes of actuator system, measuring system and their summation are discussed based on the analysis of the LPM. Since the measuring system is a coupled and nominal symmetric system, the influence of asymmetry in stiffness to the final visible frequency response functions (FRFs) is examined. Experiments in system identification and modal shape detection are conducted to validate the model.
    Modelling, Identification & Control (ICMIC), 2012 Proceedings of International Conference on; 01/2012
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    ABSTRACT: This paper focuses on augmenting the propulsion via commutation of coil array for the long-stroke magnetically levitated stage with moving coils, whose mechatronics structure have been defined. The used commutation of coil array is based on the analytical force/torque-decomposing model of the stage and it is characterized by bounding the coil currents. Through this current-bounded commutation, the 1-norm of commutated coil current vector is increased so that the propulsion can be augmented, and simultaneously the infinite norm of commutated coil current vector is limited so that the amplitudes of commutated coil currents are not beyond the capacity of selected coil power amplifiers. By the investigation example of a long-stroke magnetically levitated stage with moving coils, it is theoretically verified that the propulsion (acceleration) can be augmented by 125% as well as the commutated coil currents can be kept within the capacity of selected coil power amplifiers, 3 A. The study results indicate that the propulsion of a magnetically levitated stage can be augmented via current-bounded commutation of coil array rather than via reconfiguring the mechatronics structure of stage or reselecting coil power amplifiers of larger capacity.
    IEEE Transactions on Magnetics 01/2012; 48(1):31-37. · 1.42 Impact Factor
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    ABSTRACT: It is essential to decouple the multi- degrees-of-freedom dynamics for controlling a multi-degrees-of-freedom magnetically levitated stage with moving-coils. Decoupling the multi- degrees-of-freedom dynamics needs to decompose forces and torques acting on translator of the stage to their corresponding degrees-of-freedom. Force/torque decomposing can only be validated by real-time commutating the coil array because of the quasi-static magnetic field of the permanent magnet array. Firstly, the force/torque decomposing model is build by the planar integration of Lorentz force Law. Then, the coil array real-time commutation law of the multi-degrees-of-freedom magnetically levitated stage with moving-coils is established based on the force/torque decomposing model and the principle of minimal coil array heat-loss. Lastly, the numerical stability of the law and its error influence on corresponding force/torque are analyzed. Theoretical analysis and case research indicate that this law is of high numerical stability, it can calculate coil array currents accurately and reliably and the error of force/torque actuated by the law-commutated currents is quite small. This coil array real-time commutation law can be used to commutate the coil array, decompose the forces and torques, so as to control the multi- degrees-of-freedom magnetically levitated stage with moving-coils.
    Chinese Journal of Mechanical Engineering 11/2011; 47(6):180-185. · 0.26 Impact Factor
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    ABSTRACT: Modern manufacturing equipment often requires high-speed and ultra-precise linear motion. For implementing such motion, a coarse–fine dual stage is effective because the coarse stage has a low bandwidth with a large workspace, and in contrast, the fine stage has a high bandwidth with a small stroke. This paper presents the implementation of an air-bearing, dual-stage system and its control strategy. A closed-loop feedback in an absolute space is used to realize coarse–fine control. The fine stage is driven by a voice coil motor that tracks the designed trajectory, while the coarse stage is driven by permanent-magnet linear synchronous motor that tracks the trajectory of the fine stage to prevent its motion saturation. Also analyzed are the coupled dynamics of the air-bearing dual stage driven by a direct-drive motor. Identification and robust control design for the fine stage are introduced in detail. Method tests for the single fine stage are performed, and the results demonstrate that ultra-precision control can be realized for the fine stage. Next, experiments are presented with the dual stage using different loads. Experimental results show that our control strategy can achieve high-speed, ultra-precision linear motion through the dual stage with a satisfactory performance. KeywordsControl system-Linear motion platform-Coarse–fine control-Model identification
    International Journal of Advanced Manufacturing Technology 01/2010; 48(5):633-643. · 1.78 Impact Factor
  • Haitao Liu, Jinchun Hu, Yu Zhu, Kaiming Yang
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    ABSTRACT: The low-frequency disturbance from the ground vibration has a significant effect on the accuracy of ultra-precision micro-positioning movement. To suppress the disturbance, this paper presents a disturbance cancellation scheme in which the adaptive inverse and the PID control are combined together. For the unstable system, the PID controller is used to stabilize the plant and to estimate the effect at the output of low frequency disturbances. Compensation signal is then introduced at input end by using adaptive inverse controller to eliminate the its effect. Simulation and experimental results show that the method can effectively suppress the low-frequency disturbance and significantly improve the steady-state tracking accuracy of the ultra-precision stage.
    01/2010;
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    ABSTRACT: Magnetically levitated stages(MLS) have potentials to obtain good motion performances in high vacuum environment. Yet the electromagnetic forces/torques corresponding to six degrees of freedom(DOF) motions have coupling relationship with each current of coil array, and this coupling is still associated with the relative positions between the mover and the stator of the stage. So it is quite difficult to control the 6-DOF motions of the stage. By reasonable commutation of coil array, this complicated coupling relationship can be decoupled. The analytical force/torque-decomposing model of the stage is established first. Then the initial currents of coil array are commutated based on the pseudo inverse of the analytical force/torque-decomposing model matrix. And then the coil array currents are commutated again with different current bounds given to the initial currents as well as in the sense of minimum 2-norm of currents vector. Using the long stroke magnetically levitated stage with moving coils under investigation as examples, the currents of coil array are commutated with different current bounds adopting the proposed commutation method, the determination of current bound and the current bounds’ influences on the heat-losses in coil array are analyzed, and the effectiveness of implementation algorithm of proposed commutation method is discussed. Simulation, analysis and discussion results indicate that the currents of coil array within the given current bound can be solved analytically by proposed commutation method, and the implementation algorithm does not need any searching or iteration. By the current-bounded commutation method proposed, the amplitude of coil array currents can be limited within an appropriate current bound(This is very beneficial to the improvement of the reliability and motion performance of the stage), as well as these currents can also generate the desired forces and torques.
    Chinese Journal of Mechanical Engineering 25(6). · 0.26 Impact Factor