S. X. Wang

Stanford University, Palo Alto, California, United States

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Publications (2)1.92 Total impact

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    ABSTRACT: We have characterized the magnetic, mechanical, and optical properties of SU-8 polymer with embedded nickel nanoparticles (SU8-Ni) of concentrations ranging from 0% to 12.5% Ni by weight. Magnetic characterization was performed using a micropolysilicon torsional actuator as well as via alternating gradient magnetometry. Mechanical properties were measured using nanoindentation, and optical measurements were acquired via spectrophotometry. This magnetic polymer offers several advantages as a micromechanical structural material, including biocompatibility, chemical resistance, thermal stability, low cost, and mechanical compliance for large deflections. It is suitable for fluidics and biomedical applications where remote low-power actuation is desired.
    Journal of Microelectromechanical Systems 03/2011; 20(1-20):65 - 72. DOI:10.1109/JMEMS.2010.2093560 · 1.92 Impact Factor
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    ABSTRACT: We developed a new process for laser-printing a thin-film magnetic-polymer composite microstructural material directly onto planar silicon substrates and characterized its magnetic and mechanical properties. Using this technique we fabricated cantilever beams 100-2000 mum long, 100-500 mum wide, and 6-8 mum thick. An external magnet was used to demonstrate actuation via magnetic field gradient forces, and a scanner was constructed able to deflect a laser beam 3deg. This technique takes advantage of advances in commercial laser printing technology and is suitable for low-cost, low-temperature, large-area MEMS devices and rapid MEMS fabrication on a variety of substrates.