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ABSTRACT: We have characterized the magnetic, mechanical, and optical properties of SU-8 polymer with embedded nickel nanoparticles (SU8-Ni) of concentrations ranging from 0% to 12.5% Ni by weight. Magnetic characterization was performed using a micropolysilicon torsional actuator as well as via alternating gradient magnetometry. Mechanical properties were measured using nanoindentation, and optical measurements were acquired via spectrophotometry. This magnetic polymer offers several advantages as a micromechanical structural material, including biocompatibility, chemical resistance, thermal stability, low cost, and mechanical compliance for large deflections. It is suitable for fluidics and biomedical applications where remote low-power actuation is desired.
Journal of Microelectromechanical Systems 03/2011; · 1.92 Impact Factor