[Show abstract][Hide abstract] ABSTRACT: This paper reports a nano-opto-mechanical pressure sensor based on nano-scaled ring resonator. The pressure is measured through the output spectrum shift which is induced via mechanical deformation of the ring resonator. The sensitivity as high as 1.47 pm/kPa has been experimentally achieved which agrees with numerical prediction. Due to the strong variation of sensitivity with different ring radius and thickness of the diaphragm, the pressure sensor can be used to form an array structure to detect the pressure distribution in highly accurate measurement with low-cost advantages. The nano-opto-mechanical pressure sensor has potential applications such as shear stress displacement detection, pressure wave detector and pressure mapping etc.
[Show abstract][Hide abstract] ABSTRACT: This paper presents a Nano-opto-mechanical actuator, which is driven by optical radiation force. The actuator consists of two waveguides, two identical ring resonators, and an actuator with Bragg reflector. Light is injected into the waveguides and coupled to the Bragg reflector via the ring resonator. The actuator is displaced by the optical force. The achieved maximum displacement of the actuator is 500.2 nm with the optical power up to 200 mW. The optical actuator has merits of high resolution (2.501 nm/mW), approximately perfect linear displacement and contact-free optical drive, which results in potential applications such as precise distance control, tunable laser, and weak force detection.
[Show abstract][Hide abstract] ABSTRACT: A Nano-opto-mechanical pressure sensor using optical force is reported in this paper. The pressure sensor consists of a square diaphragm, a ring resonator and four waveguides. By applying a pressure ranging from 900 kPa to 990 kPa, the output intensity ratio sensitivity of -2.272 /kPa is achieved. Compared with traditional MEMS pressure sensor, the proposed ring pressure sensor has advantages such as higher sensitivity and resolution, which could be applied to acoustic pressure sensors and microphones etc.
[Show abstract][Hide abstract] ABSTRACT: This paper presents a pressure sensor array based on optical force using Nano-opto-mechanical Systems (NOMS). It consists of a deformable diaphragm and a waveguide array. When pressure is applied on the diaphragm, the gap between the diaphragm and the waveguide is reduced. The induced optical force deforms the waveguide and change the optical loss. In the experiment, it measures up to 32 dB optical output modulation when the pressure is changed from 0 kPa to 250 kPa. The proposed waveguide pressure sensor array has advantages such as high sensitivity (0.128 dB/kPa) and feasibility of mapping the pressure distributions, which result in potential applications such as microphone acoustics sensors and bio-medical sensors.