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ABSTRACT: Medium energy ion scattering in combination with an electrostatic high‐resolution detector system was applied to study the initial growth of YBaCuO thin films on (100) SrTiO 3 and MgO substrates. Ultrathin films with thicknesses in the range of 0.4 to 3.6 nm were deposited by inverted cylindrical magnetron sputtering. From the absolute determination of coverage as a function of depth the following growth features were deduced: on both substrates the films grow in blocks of one unit cell and full coverage with a homogeneous film is achieved at 3.6‐nm thickness. In the initial stage of nucleation, on SrTiO 3 the growth of an additional block layer is initiated only after completion of the preceding layer, while island growth is observed on MgO with different coverage values on three layer levels appearing simultaneously. © 1994 American Institute of Physics.
Applied Physics Letters 12/1994; · 3.79 Impact Factor