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P. VanDerVoorn,
M. Agostinelli,
S. Choi,
G. Curello,
H. Deshpande,
M.A. El-Tanani, W. Hafez,
U. Jalan,
L. Janbay,
M. Kang, [......],
S. Taylor,
C. Tsai,
H. Xu,
J. Xu,
L. Yang,
I. Young,
J. Yeh,
J. Yip,
P. Bai,
C. Jan
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ABSTRACT: A 32nm RF SOC technology is developed with high-k/metal-gate triple-transistor architecture simultaneously offering devices with high performance and very low leakage to address advanced RF/mobile communications markets. A high performance NMOS achieves an f<sub>T</sub> of 420GHz. Concurrently, a low leakage 30pA/um NMOS achieves an f<sub>T</sub> of 218GHz. Deep-nwell/guard rings improves noise isolation by >50dB. High Q inductors, >7V breakdown voltage power amplifier transistors, varactors, and precision passives are also presented.
VLSI Technology (VLSIT), 2010 Symposium on; 07/2010
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C. Prasad,
P. Bai,
S. Gannavaram, W. Hafez,
J. Hicks,
C. Jan,
J. Lin,
M. Jones,
K. Komeyli,
R. Kotlyar,
K. Mistry,
I. Post,
C. Tsai
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ABSTRACT: In this paper, we present extensive reliability characterization results for a novel dual gate 45 nm HK+MG technology. BTI, HCI and TDDB degradation modes on the Logic and I/O transistors are studied and excellent reliability is demonstrated. Emphasis is placed on the importance of process optimizations to support robust I/O transistors while maintaining the high performance and reliability of Logic transistors. Monitoring of reliability for HVM and collateral reliability are also addressed.
Reliability Physics Symposium (IRPS), 2010 IEEE International; 06/2010
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C.-H. Jan,
M. Agostinelli,
M. Buehler,
Z.-P. Chen,
S.-J. Choi,
G. Curello,
H. Deshpande,
S. Gannavaram, W. Hafez,
U. Jalan, [......],
H. Tashiro,
C. Tsai,
P. Vandervoorn,
J. Xu,
L. Yang,
J.-Y. Yeh,
J. Yip,
K. Zhang,
Y. Zhang,
P. Bai
[show abstract]
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ABSTRACT: A leading edge 32 nm high-k/metal gate transistor technology has been optimized for SoC platform applications that span a wide range of power, performance, and feature space. This technology has been developed to be modular, offering mix-and-match transistors, interconnects, RF/analog passive elements, embedded memory, and noise mitigation options. The low gate leakage of the high-k gate dielectric enables the triple transistor architecture to support ultra low power, high performance, and high voltage tolerant I/O devices concurrently. Embedded memories include high density (0.148 um<sup>2</sup>) and low voltage (0.171 um<sup>2</sup>) SRAMs as well as secure OTP fuses. Analog/RF SoC features include high precision, high quality passives (resistors, capacitors and inductors) and deep-nwell noise isolation.
Electron Devices Meeting (IEDM), 2009 IEEE International; 01/2010
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C.-H. Jan,
P. Bai,
S. Biswas,
M. Buehler,
Z.-P. Chen,
G. Curello,
S. Gannavaram, W. Hafez,
J. He,
J. Hicks, [......],
J. Rizk,
G. Sacks,
H. Tashiro,
D. Towner,
C. Tsai,
Y. Wang,
L. Yang,
J.-Y. Yeh,
J. Yip,
K. Mistry
[show abstract]
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ABSTRACT: A leading edge 45 nm CMOS system-on-chip (SOC) technology using Hafnium-based high-k/metal gate transistors has been optimized for low power products. PMOS/NMOS logic transistor drive currents of 0.86/1.08 mA/um, respectively, have been achieved at 1.1 V and off-state leakage of 1 nA/um. Record RF performance for a mainstream 45 nm bulk CMOS technology has been achieved with measured f<sub>T</sub>/f<sub>MAX</sub> values of 395 GHz/410 GHz for NMOS and 300 GHz/325 GHz for PMOS with 28 nm L<sub>gate</sub> transistors. HV I/O transistors with robust reliability and other SOC features, including linear resistors, MIS and MIM capacitors, varactors, inductors, vertical BJTs, precision diodes and high density OTP fuses are employed for HV I/O, analog and RF circuit integration.
Electron Devices Meeting, 2008. IEDM 2008. IEEE International; 01/2009
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Y. Wang,
H. Ahn,
U. Bhattacharya,
T. Coan,
F. Hamzaoglu, W. Hafez,
C.-H. Jan,
R. Kolar,
S. Kulkarni,
J. Lin,
Y. Ng,
I. Post,
L. Wel,
Y. Zhang,
K. Zhang,
M. Bohr
[show abstract]
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ABSTRACT: A low-power high-speed SRAM macro is implemented in an ultra-low-power 8M 65nm CMOS for mobile applications. The 1Mb macro features a 0.667μm<sup>2</sup> low-leakage memory cell and operates with supply voltage from 0.5V to 1.2V. It operates at a frequency of 1.1 GHz at 1.2V and 250MHz at 0.7V. Leakage is reduced to 12μA/Mb at the data retention voltage of 0.5V. The measured bitcell leakage from the SRAM array is ~2pA/b at retention voltage with integrated leakage reduction schemes.
Solid-State Circuits Conference, 2007. ISSCC 2007. Digest of Technical Papers. IEEE International; 03/2007
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I. Post,
M. Akbar,
G. Curello,
S. Gannavaram, W. Hafez,
U. Jalan,
K. Komeyii,
J. Lin,
N. Lindert,
J. Park,
J. Rizk,
G. Sacks,
C. Tsai,
D. Yeh,
P. Bai,
C.-H. Jan
[show abstract]
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ABSTRACT: Record breaking RF performance was recently achieved on a 65nm CMOS technology (29nm L<sub>gate</sub>, 210nm pitch) employing uni-axial strained silicon transistors. These highest-reported cutoff frequencies for NMOS transistors achieve f<sub>T</sub>/f<sub>MAX</sub> values of 360 GHz/420 GHz. PMOS transistors also demonstrate superior performance with f<sub>T</sub>/f<sub>MAX</sub> values of 238 GHz/295 GHz. Varactor performance on this substrate technology is also discussed
Electron Devices Meeting, 2006. IEDM '06. International; 01/2007