Publications (2)2.68 Total impact
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Article: Mechanical characteristics and applications of diamondlike-carbon cantilevers fabricated by focused-ion-beam chemical vapor deposition
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ABSTRACT: Diamondlike-carbon (DLC) cantilevers were fabricated with a commercially available focused-ion-beam chemical-vapor-deposition (FIB-CVD) system using a beam of 30 keV Ga <sup>+</sup> ions, and the mechanical characteristics of the cantilevers were measured. Vibration frequency of the cantilevers was passively measured using scanning electron microscopy. Resonant frequency of DLC cantilevers fabricated at 0.1–0.5 pA beam current was found to be constant. The equivalent spring constant of the cantilevers was identified by squeezing the tip of a Si <sub>3</sub> N <sub>4</sub> cantilever and a DLC cantilever together. Using the measured displacement, the spring constant of the DLC cantilever was calculated as (1.1±0.2)×10<sup>-2</sup> N / m . Furthermore, Young’s modulus and the density of the DLC cantilevers were measured to be 187±32 GPa and (3.8±0.7)×10<sup>3</sup> kg / m <sup>3</sup> , respectively. The DLC cantilevers were used as mass sensors in an ultrasensitive sensing application. A small amount of DLC was deposited on the tip of a DLC cantilever as a mass adhesion by FIB-CVD at 0.5 pA beam current. As a result, the authors were able to measure a small amount of mass shift in the femtogram range using a DLC cantilever.Journal of vacuum science & technology. B, Microelectronics and nanometer structures: processing, measurement, and phenomena: an official journal of the American Vacuum Society 12/2006; · 1.34 Impact Factor -
Article: Nanomechanical switch fabrication by focused-ion-beam chemical vapor deposition
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ABSTRACT: Focused-ion-beam chemical vapor deposition (FIB-CVD) is an excellent technology to form three-dimensional nanostructures. Various three-dimensional nanostructures such as an inductance, a capacitor, a resistance, and a filter-circuit have been demonstrated by applying FIB-CVD with phenanthrene ( C <sub>14</sub> H <sub>10</sub>) source gas using a computer-controlled pattern generator (CPG). The electrical resistivity measurement of the free-space-nanowiring was carried out by two terminal electrode method. The resistivity was 1×10<sup>2</sup> Ω cm in the case of using C <sub>14</sub> H <sub>10</sub> . To reduce the electrical resistivity, tungsten hexacarbonyl [ W ( C O )<sub>6</sub>] is added to C <sub>14</sub> H <sub>10</sub> as a source gas. Increasing content of W ( C O )<sub>6</sub> , the electrical resistivity becomes lower from 1×10<sup>2</sup> to 2×10<sup>-2</sup> Ω cm at room temperature. By using free-space-nanowiring fabrication technology, the world smallest nanomechanical switch composed of a coil and a nanowiring has been fabricated and confirmed the switching operation by applying a voltage.Journal of vacuum science & technology. B, Microelectronics and nanometer structures: processing, measurement, and phenomena: an official journal of the American Vacuum Society 12/2004; · 1.34 Impact Factor
