ABSTRACT: A new approach for the fabrication of large contour-mode single-crystal silicon resonators has been demonstrated without the use of SOI substrates. 24-MHz-disk resonators have been built thanks to industrial facilities dedicated to the integration of passive components on silicon. They exhibit a good compromise between the quality factor Q higher than 50000 and the motional resistance of a few kilo-ohms.
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International; 07/2009