Publications (2)3.78 Total impact
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Article: Properties of Surface Metal Micromachined Rectangular Waveguide Operating Near 3 THz
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ABSTRACT: Single-mode TE10 rectangular waveguides operating near 3 THz have been demonstrated. The waveguides have internal dimensions of 75 μm × 37 μm (WR-0.3) and are fabricated using an additive gold electroplating process on a silicon substrate. The impact of photoresist removal holes was minimized by full-wave design of the hole and matching structures. Waveguides were measured at three frequencies from 2.56 to 3.11 THz and demonstrated loss as low as 1.3 dB/mm at 3.11 THz, corresponding to a loss per wavelength of 0.12 dB/λ. This paper summarizes the design, fabrication, and measurement of these micromachined waveguides operating near 3 THz.IEEE Journal of Selected Topics in Quantum Electronics 03/2011; · 3.78 Impact Factor -
Conference Proceeding: Design, fabrication, and characterization of metal micromachined rectangular waveguides at 3 THz
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ABSTRACT: Single-mode 75 mum x 37 mum rectangular waveguide components, including horn antennas, couplers, and bends, for operation at 3 THz have been designed and fabricated using thick gold micromachining. THz transmission through these waveguides has been quasi-optically measured at 2.92 THz. This technology offers the potential for realizing miniature integrated systems operating in the 3 THz frequency range.Antennas and Propagation Society International Symposium, 2008. AP-S 2008. IEEE; 08/2008
