Publications (3)6.37 Total impact
Article: Mass spectrometric investigations on plasmas obtained from a dual electron cyclotron resonance-radio frequency discharge[show abstract] [hide abstract]
ABSTRACT: Diamond-like carbon (DLC) thin films have been prepared by chemical vapour deposition assisted by electron cyclotron resonance (ECR) plasma of methane at low pressure, with radio frequency (RF) power applied to the substrate. This paper is focused on the plasma diagnostic investigations by mass spectrometry in terms of neutral and ionic populations. Ion energy distribution of different species is also presented and the influence of ECR and/or RF excitations on the energy of ion bombardment is studied. The role of different ionic or neutral species in the growth mechanism and in the formation of nanocrystalline clusters in an amorphous matrix, as observed in a previous study by transmission electron microscopy and electron energy loss spectroscopy, is discussed here.Plasma Sources Science and Technology 12/1998; 7(4):607. · 2.52 Impact Factor
Article: Observation of nanocrystalline diamond in diamondlike carbon films deposited at room temperature in electron cyclotron resonance plasma[show abstract] [hide abstract]
ABSTRACT: Diamondlike carbon (DLC) thin films have been prepared by chemical vapor deposition assisted by electron cyclotron resonance plasma at low pressure with radio frequency (rf) power applied to the substrate. The microstructure studies by transmission electron microscopy and electron energy loss spectroscopy show the existence of nanocrystalline diamond grains in DLC films prepared at 0.35 Pa. The cluster’s size varies from 4 to 30 nm with bias voltage (V<sub>b</sub>) varying from -200 to -600 V . A phase transition from hexagonal to cubic diamond was also observed with increasing V<sub>b</sub>. © 1997 American Institute of Physics.Applied Physics Letters 06/1997; · 3.84 Impact Factor
Article: Effect of negative bias voltage on a-C:H films deposited in electron cyclotron resonance plasma[show abstract] [hide abstract]
ABSTRACT: a-C:H films were prepared by chemical vapour deposition assisted by electron cyclotron resonance (ECR) plasma from CH4 at low pressure (p ≤ 0.35 Pa) with radio frequency (RF) power applied to the substrate. The effects of negative bias voltage Vb on deposition rate R and structure of the films were examined. As a consequence of RF polarisation, good adhesive diamond-like carbon (DLC) films with R ≤ 200 Å/min were obtained. The microstructure of the films has been studied by ultraviolet-visible-near-infrared (UV-Vis-NIR) spectroscopy, high resolution transmission electron microscopy (HRTEM), Fourier transform infrared (FTIR) spectroscopy, Raman spectroscopy and electron energy loss spectroscopy (EELS). Films deposited from ECR plasma at 0.35 Pa were compared to films obtained from an RF plasma of CH4 in a diode reactor at 7 Pa. The FTIR and EELS results suggest that with increasing Vb the amount of hydrogen and C sp2 decreases and the network becomes highly sp3 bonded. HRTEM studies reveal the existence of nanocrystalline diamond clusters in the amorphous matrix. It appears that the deposition from a dual ECR-RF plasma at low pressure can be a powerful and flexible technique to obtain a-C:H films with an important amount of C sp3 bonding and a low hydrogen content.Diamond and Related Materials.