Publications (2)3.98 Total impact
Article: Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection[show abstract] [hide abstract]
ABSTRACT: A simple linear electromechanical model for an electrostatically driven resonating cantilever is derived. The model has been developed in order to determine dynamic quantities such as the capacitive current flowing through the cantilever-driver system at the resonance frequency, and it allows us to calculate static magnitudes such as position and voltage of collapse or the voltage versus deflection characteristic. The model is used to demonstrate the theoretical sensitivity on the attogram scale of a mass sensor based on a nanometre-scale cantilever, and to analyse the effect of an extra feedback loop in the control circuit to increase the Q factor.Nanotechnology 05/2001; 12(2):100. · 3.98 Impact Factor
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ABSTRACT: Miniaturization of cantilever dimensions will increase both the mass and spatial resolution of a resonating cantilever-based mass sensor, which monitors the mass change of the cantilever by measuring its resonant frequency shift. A fabrication method for nanometer-sized cantilevers with electrostatic excitation and integrated capacitive readout is introduced. The dynamic behavior of the nanometer-sized cantilever is characterized at atmospheric pressure using optical microscopy and in vacuum using scanning electron microscopy (SEM). A monolithic integration method for combining the nano-cantilevers with CMOS circuitry is described in detail. The circuitry is used to enhance the capacitive readout. The fabrication results, showing integrated nano-cantilevers with a CMOS analog amplification circuit, are presented along with preliminary electrical characterization of the device.Sensors and Actuators A: Physical.