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ABSTRACT: Deep-UV lithography using high-efficiency phase mask has been developed to print 100 nm period grating on sol-gel based thin layer. High efficiency phase mask has been designed to produce a high-contrast interferogram (periodic fringes) under water immersion conditions for 244 nm laser. The demonstration has been applied to a new developed immersion-compatible sol-gel layer. A sol-gel photoresist prepared from zirconium alkoxides caped with methacrylic acids was developed to achieve 50 nm resolution in a single step exposure. The nanostructures can be thermally annealed into ZrO<sub>2</sub>. Such route considerably simplifies the process for elaborating nanopatterned surfaces of transition metal oxides, and opens new routes for integrating materials of interest for applications in the field of photocatalysis, photovoltaic, optics, photonics or microelectronics.
Optics Letters 11/2012; 37(22):4651-3. · 3.40 Impact Factor
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12/2011; , ISBN: 978-953-307-602-7
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Ali Dirani,
Fabrice Stehlin,
Ihab Dika, Arnaud Spangenberg,
Nathan Grumbach,
Jean-Louis Gallani,
Bertrand Donnio,
Romain Greget,
Sylvie Begin-Colin,
Arnaud Demortière,
Olivier Soppera
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ABSTRACT: DUV interferometric lithography and diblock copolymer self-organization have successfully been combined to provide a simple and highly collective nanopatterning technique enabling the organization of nanoparticles over several orders of magnitude, from nanometre to millimetre. The nanostructural changes at the surface of the polymer film after thermal annealing have been monitored by AFM and the process parameters optimized for obtaining a long-range organization of the lamellar domains. In particular, the impact of the annealing conditions and geometric parameters of the substrate patterns have been investigated. The nanopatterns resulting from the lamellar demixion of (PS-b-MMA) were used for a controlled deposition of nanoparticles. The affinity of the hydrophobic particles for the PS block was demonstrated, opening new doors towards the preparation of high-density arrays of nanoparticles with potential applications in data storage.
Macromolecular Rapid Communications 10/2011; 32(20):1627-33. · 4.60 Impact Factor
