[Show abstract] [Hide abstract]
ABSTRACT: The wafer handling is a complex operation that requires wafer positioning, accuracy and repeatability needed for reliable results. Every action taken with a wafer must be exactly what the operator wants, no more and no less. In semiconductor environment the motor control is fundamental, because the trajectory on the work-piece must be compensated in real-time. The authors would present a demo capable to demonstrate that all command tasks for the movement of a manipulator robot could be generalized to any other robot.
Climbing and Walking Robots - Proceedings of the 8th International Conference on Climbing and Walking Robots and the Support Technologies for Mobile Machines, CLAWAR 2005, London, UK, September 13-15, 2005; 01/2005