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ABSTRACT: The crosstalk of a 10 GHz-spaced 32 channel arrayed-waveguide
grating has been reduced from -17 to -30 dB and from -16 to -27 dB for
the TE and TM modes, respectively, via the photosensitivity under 193 nm
ArF excimer laser irradiation. A metal mask with a window was placed on
the arrayed waveguides and the unmasked arrayed waveguides were
irradiated until the crosstalk was reduced to the desired value. This
technique means that fine adjustment of the laser beam on individual
arrayed waveguides is no longer necessary
Electronics Letters 02/2000; · 0.96 Impact Factor
