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Publications (1)0 Total impact

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    ABSTRACT: A methodology has been developed for fast process development and integration of multilevel metallization systems for ultra large scale integration technology. This methodology defines a set of primitive processes, which are then arranged in the required configuration to build or develop multilevel metallization systems. Each primitive process will have a predictive model and process control and calibration strategy including a set of test structures. This paper will describe how the methodology defined above has been applied to develop contacts and vias for multilevel metallization
    University/Government/Industry Microelectronics Symposium, 1995., Proceedings of the Eleventh Biennial; 06/1995