Denny K. Miu

California Institute of Technology, Pasadena, CA, United States

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Publications (6)16 Total impact

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    ABSTRACT: This paper presents results related to the design, fabrication and static/dynamic testing of a silicon micromachined integrated suspension system. This novel magnetic read/write head suspension with its built-in electrodes has been developed especially for automated assembly with miniaturized slider bearings. The one-piece construction silicon microgimbal and the polyimide-reinforced silicon load-beam are designed to have minimum profile, maximum pitch and roll compliances, maximum in-plane stiffness and maximum shock resistance, all of which are important operational requirements for the emerging small-form-factor magnetic recording rigid disk drive market.
    Sensors and Actuators A Physical 07/1996; DOI:10.1016/S0924-4247(97)80078-7 · 1.94 Impact Factor
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    ABSTRACT: It is projected that by the year 2001, the disk drive industry will be shipping products with track density on the order of 25,000 tracks-per-inch, which would require a servo bandwidth of at least 3 kHz. This paper presents initial fabrication results of an industry and government supported research project at Caltech and UCLA to develop piggyback electromagnetically driven microactuators for such applications, which are fabricated using the state-of-the-art silicon micromachining techniques
    IEEE Transactions on Magnetics 12/1995; DOI:10.1109/20.490204 · 1.21 Impact Factor
  • D.K. Miu, Yu-Chong Tai
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    ABSTRACT: Silicon micromachining technology will play an important role in the fabrication of high-bandwidth servo controlled microelectromechanical (mechatronic) components for super-compact disk drives. At the University of California, Los Angeles, and the California Institute of Technology, for the last three years, we have initiated a number of industry-supported joint research projects to develop the necessary technology building blocks for an integrated drive design of the future. These efforts include a silicon read/write head microgimbal with integrated electrical and mechanical interconnects, which targets the next-generation 30% form factor pico-sliders, and an electromagnetic piggyback microactuator in super-high-track-density applications, both of which utilize state-of-the-art silicon micromachining fabrication techniques
    IEEE Transactions on Industrial Electronics 07/1995; DOI:10.1109/41.382133 · 6.50 Impact Factor
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    ABSTRACT: This paper documents results related to design optimization, fabrication process refinement, and micron-level static/dynamic testing of silicon micromachined microgimbals that have applications in super-compact computer disk drives as well as many other engineering applications of microstructures and microactuators requiring significant out-of-plane motions. The objective of the optimization effort is to increase the in-plane to out-of-plane stiffness ratio in order to maximize compliance and servo bandwidth and to increase the displacement to strain ratio to maximize the shock resistance of the microgimbals, while that of the process modification effort is to simplify in order to reduce manufacturing cost. The testing effort is to characterize both the static and dynamic performance using precision instrumentation in order to compare various prototype designs
    Journal of Microelectromechanical Systems 04/1995; DOI:10.1109/84.365366 · 1.92 Impact Factor
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    Denny K. Miu, Yu-Chong Tai
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    ABSTRACT: Silicon micromachining techniques offer many exciting opportunities for fabricating both passive microstructures and active electromagnetic microactuators for significant form factor reduction and increase in recording density of future magnetic recording rigid disk drives. In this overview paper, the authors have presented some recent results and novel product concepts
    American Control Conference, 1995. Proceedings of the; 01/1995
  • Denny K. Miu, Bingen Yang
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    ABSTRACT: In our previous work, it was shown that for simple control systems with mechanical flexibilities such as spring-mass systems or uniform cross-section linear elastic beams, the complex conjugate transfer function zeros can be interpreted as the resonances of a sub-portion of the flexible structure with additional constraints imposed by the sensor and actuator. In this paper, the aforementioned intuitive physical observation is verified mathematically for general lumped and distributed parameter flexible control systems with colocated sensor/actuator.
    Journal of Dynamic Systems Measurement and Control 03/1994; 116(1). DOI:10.1115/1.2900670 · 1.04 Impact Factor