ABSTRACT: A process for the deposition of a solid layer onto a liquid is presented. The polymer poly-di-chloro-paraxylylene, also known as Parylene C, was grown on low vapour pressure liquids using the conventional low pressure chemical vapour deposition process. A reactor was built and a process developed to enable the deposition of Parylene C at atmospheric pressure over high vapour pressure liquids. It was used to deposit Parylene C over water among others. In all cases Parylene C encapsulated the liquid without influencing its initial shape. The results presented here show also that the Parylene C properties are not affected by its growth on liquid templates and the roughness of the Parylene C surface in contact with the liquid during the
deposition is extremely low.
Thin Solid Films. 01/2010; 518:5061.