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Publications (7)0 Total impact

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    ABSTRACT: To realize a high throughput optical mask-less lithography (OML) which is utilized for the semiconductor integrated circuit (IC) mass fabrication, we have been studying the high speed spatial light modulator (SLM). In this paper, we report a Micro-mirror On Ribbon-actuator (MOR) as a novel MEMS SLM. The MOR consists of a ribbon actuator which carries a mirror placed on the offset position. The mirror tilts when the ribbon actuator is bent by electrostatic force. The high speed driving of the MOR is realized by the high resonant frequency of the ribbon actuator and the large damping factor of the submicron gap. The MOR showed the routinely switching response of less than 3 musec and the resonant frequency of around 1.7 MHz. The 8times8 passive matrix drive of the MOR was also demonstrated.
    Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on; 02/2008
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    ABSTRACT: In this paper, we propose a novel variable capacitor having higher capacitance ratio (C/R) >35 than ever before. So far, various types of RF-MEMS variable capacitors have been proposed, but even the highest C/R among the capacitors under development is now the order of 4. For enabling the multi-band of the wireless terminal, it has been expected to achieve a device having higher C/R. We demonstrate by combining arbitrarily the quantity of the chameleon actuators and the area of capacitor plate, the capacitance value can be digitally controlled in a wide range.
    Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International; 07/2007
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    ABSTRACT: We have developed a new electrostatic actuator consisting of multilevel structure, which can move in a long distance with no need of a high driving voltage. This actuator features to have a built-in upward-deflection. We have also developed a variable capacitor, which can be controlled with a capacitance ratio (C/R) higher than 10 using a new configuration of the actuators and capacitor plates. The overall process to make these devices is quite easy to integrate with the CMOS circuits.
    Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International; 07/2007
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    ABSTRACT: Technique to pop up a plate vertically using the technique for IC manufacturing process is applicable to various devices in both RF and optical MEMS. This paper introduces novel technique using "Turning-structured Bi-material Beams" for fabrication of a vertical structure and explains success in fabrication of a vertical structure by applying the technique.
    Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS); 02/2004
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    ABSTRACT: We have been studying the "Optically Readable Bimaterial Infrared Detector" based on surface micro-machining wafer process technology to realize an inexpensive infrared camera. This paper reports that we have developed a detector by incorporating the new "Cancel Structure" and we have successfully obtained an infrared image without a thermo-electric (TE) cooler
    Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on; 02/2002
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    ABSTRACT: In this paper, we developed 'Optically Readable BM Infrared Detector' of 55μm x 55μm pixel pitch and 266 X 194 array and evaluated the characteristics of this detector. In the infrared imaging test, we succeeded in obtaining infrared image of a person by adding an offset correction to the raw image taken through CCD camera, whereby we made a great progress to embody an infrared camera with this method. In the infrared imaging testing without correction, we succeeded in obtaining an infrared image of an electric heater and we confirmed the feasibility of the direct viewing in this method. This result offers us a hope to explore new application fields as an infrared camera of low power consumption under this method.© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
    10/2001;
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    ABSTRACT: In this paper, we developed 'Optically Readable BM Infrared Detector' of 55 micrometers X 55 micrometers pixel pitch and 266 X 194 array and evaluated the characteristics of this detector. In the infrared imaging test, we succeeded in obtaining infrared image of a person by adding an offset correction to the raw image taken through CCD camera, whereby we made a great progress to embody an infrared camera with this method. In the infrared imaging testing without correction, we succeeded in obtaining an infrared image of an electric heater and we confirmed the feasibility of the direct viewing in this method. This result offers us a hope to explore new application fields as an infrared camera of low power consumption under this method.
    Proc SPIE 01/2001;