Publications (2)3.33 Total impact
Acta Oncologica 02/1999; 38(2):267-8. · 3.33 Impact Factor
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ABSTRACT: The preparation of TiO2, In2O3, SnO2 doped In2O3 (ITO) and PbZr0.5Ti0.5O3 (PZT) films have been investigated by the metallorganic (MO) laser photolysis. TiO2 anatase phase was successfully obtained from Ti-2-ethylhexanolate by a two-step irradiation method, while rutile was formed from TiOacac under the same irradiation conditions. In2O3 and ITO films were crystallized by ArF irradiation above the laser fluence of 10 mJ/cm2. The resistivity of the In2O3 film irradiated by further ArF laser in a vacuum and air atmosphere was 2.2×10−2 and , respectively. The lowest resistivity of the ITO film irradiated by the ArF laser in a vacuum was . Epitaxial PZT film on a SrTiO3 substrate was successfully obtained by MO laser photolysis.Applied Surface Science.