Publications (2)0 Total impact
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Conference Proceeding: 11E-4 Application of a Vibrating Membrane Model to Bulk-Acoustic-Wave Resonators
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ABSTRACT: For a three-dimensional description of rectangular BAW resonators, a simple vibrating membrane model is revisited. Displacement profiles from this model are compared to measured profiles. Furthermore, a method for extraction of dispersion characteristics from electrical measurements is proposed and verified against interferometry measurements.Ultrasonics Symposium, 2007. IEEE; 12/2007 -
Article: 11E-4 Application of a Vibrating Membrane Model to Bulk-Acoustic-Wave Resonators
[show abstract] [hide abstract]
ABSTRACT: Ultrasonics Symposium, 2007. IEEE, 1045-1048 For a three-dimensional description of rectangular BAW resonators, a simple vibrating membrane model is revisited. Displacement profiles from this model are compared to measured profiles. Furthermore, a method for extraction of dispersion characteristics from electrical measurements is proposed and verified against interferometry measurements.