Publications (4)0 Total impact
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Conference Proceeding: Micromachining optical arrays
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ABSTRACT: This paper describes two fabrication techniques-dry and wet etching for microstructured optical arrays (MOAs). The MOAs consist of arrays of channels deep etched in silicon. They use grazing incidence reflection to focus the X-rays through the consecutive aligned arrays of channels, ideally reflecting once off a vertical and smooth channel wall in each array. The MOAs were proposed by the Smart X-ray Optics (SXO) programme as small scale optics for micro-probing of biological cells and tissues. The first fabrication method requires inductively coupled plasma (ICP) using Bosch processes. The second one involves etching 〈110〉 silicon wafers in alkaline solutions.Semiconductor Conference (CAS), 2010 International; 11/2010 -
Article: Smart X-ray optics
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ABSTRACT: This paper describes reflective adaptive/active optics for applications including studies of biological radiation damage. The optics work on the polycapillary principle, but use arrays of channels in thin silicon. For optimum performance the x-rays should reflect once off a channel wall in each of two successive arrays. This reduces aberrations since then the Abbe sine condition is approximately satisfied. Adaptivity is achieved by flexing the arrays via piezo actuation, providing further aberration reduction and controllable focal length.Journal of Physics Conference Series 09/2009; 186(1):012067. -
Article: Development of net-shape piezoelectric actuators for large x-ray optics
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Article: Active microstructured x-ray optical arrays
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Institutions
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2009
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University of Birmingham
- School of Metallurgy and Materials
Birmingham, ENG, United Kingdom
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