Michael A Kokarev

Publications (3)4.23 Total impact

• Article: Indirect broadband optical monitoring with multiple witness substrates.

  Valery G Zhupanov, Evgeny V Klyuev, Sergey V Alekseev, Ivan V Kozlov, Michael K Trubetskov, Michael A Kokarev, Alexander V Tikhonravov
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  ABSTRACT: We present an indirect broadband optical monitoring approach based on using several witness substrates that are brought to a measurement position in a special sequence. Different witness substrates are used to monitor not groups of successive design layers but specially chosen design layers. An attractive feature of the presented monitoring approach is the ability to reliably control thin dielectric and metal layers. Considered examples demonstrate a good accuracy of the proposed approach.
  Applied Optics 05/2009; 48(12):2315-20. · 1.41 Impact Factor
• Article: New optimization algorithm for the synthesis of rugate optical coatings.

  Alexander V Tikhonravov, Michael K Trubetskov, Tatiana V Amotchkina, Michael A Kokarev, Norbert Kaiser, Olaf Stenzel, Steffen Wilbrandt, Dieter Gäbler
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  ABSTRACT: A model of a rugate coating that takes into account production potentialities of the Leybold Syrus Pro 1100 deposition system is presented. An efficient algorithm for the synthesis of rugate coatings is proposed. Numerical results are also presented.
  Applied Optics 04/2006; 45(7):1515-24. · 1.41 Impact Factor
• Article: Effect of systematic errors in spectral photometric data on the accuracy of determination of optical parameters of dielectric thin films.

  Alexander V Tikhonravov, Michael K Trubetskov, Michael A Kokarev, Tatiana V Amotchkina, Angela Duparré, Etienne Quesnel, Detlev Ristau, Stefan Günster
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  ABSTRACT: The determination of optical parameters of thin films from experimental data is a typical task in the field of optical-coating technology. The optical characterization of a single layer deposited on a substrate with known optical parameters is widely used for this purpose. Results of optical characterization are dependent on not only the choice of the thin-film model but also on the quality of experimental data. The theoretical results presented highlight the effect of systematic errors in measurement data on the determination of thin-film parameters. Application of these theoretical results is illustrated by the analysis of experimental data for magnesium fluoride thin films.
  Applied Optics 06/2002; 41(13):2555-60. · 1.41 Impact Factor