T. Ishizuya

Publications (2)0 Total impact

• Conference Proceeding: New concept and fabrication of surface micro machined vertical structure

  T. Ishizuya, J. Suzuki, Y. Ohuchi, H. Konishi, K. Akagawa, Y. Suzuki
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  ABSTRACT: Technique to pop up a plate vertically using the technique for IC manufacturing process is applicable to various devices in both RF and optical MEMS. This paper introduces novel technique using "Turning-structured Bi-material Beams" for fabrication of a vertical structure and explains success in fabrication of a vertical structure by applying the technique.
  Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS); 02/2004
• Conference Proceeding: 160 × 120 pixels optically readable bimaterial infrared detector

  T. Ishizuya, J. Suzuki, K. Akagawa, T. Kazama
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  ABSTRACT: We have been studying the "Optically Readable Bimaterial Infrared Detector" based on surface micro-machining wafer process technology to realize an inexpensive infrared camera. This paper reports that we have developed a detector by incorporating the new "Cancel Structure" and we have successfully obtained an infrared image without a thermo-electric (TE) cooler
  Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on; 02/2002