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ABSTRACT: The simulation of integrated electromagnetic sensors and actuators
can be performed in conjunction with the electronics to simulate a
complete microsystem. A reluctant micro-relay and an inductive
displacement sensor are characterized using finite elements.
Macro-models using extracted parameters are coded with analog hardware
description languages for circuit simulators, with the goal of global
system simulation and optimization. The methodology is applicable to all
integrated and hybrid transducers which can be modeled using a discrete
variable formulation
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on; 07/1997
