Kuo Hui Su

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Publications (1)0 Total impact

Conference Proceeding: Fluorinated ALD Al<sub>2</sub>O<sub>3</sub> Gate Dielectrics by CF<sub>4</sub> Plasma

Chao-Sung Lai, Kung Ming Fan, Yi Jung Chen, Kuo Hui Su, Chang Rong Wu, Shian Jyh Lin, Chung-Yuan Lee

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ABSTRACT: Not Available

Semiconductor Device Research Symposium, 2005 International; 02/2005

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