-
2011 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2011, San Francisco, CA, USA, September 25-30, 2011; 01/2011
-
[show abstract]
[hide abstract]
ABSTRACT: In this paper, top-down and bottom-up approaches are used to predict material properties of group III-nitride nanostructures. The first approach calculates the melting temperature, melting enthalpy, Debye temperature and energy bandgap of InN, GaN and AlN through classical thermodynamics. The second approach calculates the surface energies in the liquid and solid states of the considered nitrides materials through molecular dynamics. Moreover, the liquid and solid surface energies of the zinc-blende and wurtzite III-V materials are compared. Finally, the phase diagram of a ternary III-nitride nanomaterial, AlGaN, is presented and the variation of its energy bandgap with composition is predicted.
Physical Chemistry Chemical Physics 07/2010; 12(26):7203-10. · 3.57 Impact Factor
-
Microelectronics Reliability. 01/2010; 50:1103-1106.
-
Eric Colinet,
Cedric Durand,
Laurent Duraffourg,
Patrick Audebert,
Guillaume Dumas,
Fabrice Casset,
Eric Ollier,
Pascal Ancey,
Jean Francois Carpentier, Lionel Buchaillot,
Adrian M. Ionescu
[show abstract]
[hide abstract]
ABSTRACT: Capacitive measurement of very small displacement of nano-electro-mechanical systems (NEMS) presents some issues that are discussed in this article. It is shown that performance is fairly improved when integrating on a same die the NEMS and CMOS electronics. As an initial step toward full integration, an in-plane suspended gate MOSFET (SGMOSFET) compatible with a front-end CMOS has been developed. The device model, its fabrication, and its experimental measurement are presented. Performance obtained with this device is experimentally compared to the one obtained with a stand-alone NEMS readout circuit, which is used as a reference detection system. The 130 nm CMOS ASIC uses a bridge measurement technique and a high sensitive first stage to minimize the influence of any parasitic capacitances.
IEEE Journal of Solid-State Circuits 02/2009; · 3.23 Impact Factor
-
[show abstract]
[hide abstract]
ABSTRACT: This paper describes the design of resonators using waves guided in a piezoelectric layer located above a Bragg mirror. Such a resonator is suitable for the intermediate frequency (IF) and high frequency (HF) ranges. In the IF (about 600 MHz) band, maximum quality factor is achieved when exploiting the second guided mode (analogous to the S<sub>0</sub> Lamb wave). In the HF band (about 2 GHz), a higher order mode (similar to the S<sub>1</sub> Lamb wave) provides high coupling factors.
Frequency Control Symposium, 2008 IEEE International; 06/2008
-
[show abstract]
[hide abstract]
ABSTRACT: This paper proposes a successful asynchronous remote powering and control of electrostatic microactuators, organized in two distributed micro motion systems (DMMS) with the aim of realizing a wireless microrobot. Remote powering of the integrated circuit (IC) and the microelectromechanical systems (MEMS) components is obtained by inductive coupling at 13.56 MHz, and the digital transmission is created by modulating the carrier amplitude by 25%. The system includes a high-voltage controller IC. It provides a link between the power and data on the receiver antenna on one side, and the actuators of the microrobot on the other. The micromachined antenna is designed to optimize the inductive coupling. The main IC building blocks, such as the received signal rectifier/amplifier, the integrated digital processing and the DMMS actuation voltage generation are given in detail. The demonstrator has successfully achieved the remote control and asynchronous operation under 100 V of two arrays of 1700 electrostatic actuators, having a capacity of 2 nF each
IEEE/ASME Transactions on Mechatronics 03/2007; · 2.87 Impact Factor
-
CoRR. 01/2007; abs/0711.3321.
-
[show abstract]
[hide abstract]
ABSTRACT: We study electrostatic parallel-plate actuators operated in dielectric liquids. The stable operation zone of the actuators in common liquids is extended far beyond one-third of the initial gap, which is the typical limit of stability for such actuators operated in air. The pull-in effect can even be totally suppressed. In spite of higher dielectric constants in liquids than in air, which is expected to magnify the electrostatic forces, the required voltages to actuate are not significantly reduced and may even be larger. These results are discussed with regard to the dielectric constant of the liquids and to the electrical insulating layers of the parallel plates which appear to play a major role. Finally, the analytical approach is compared to experiments performed on fabricated devices.
Applied Physics Letters 02/2006; · 3.84 Impact Factor
-
01/2003
-
[show abstract]
[hide abstract]
ABSTRACT: This paper presents the design, fabrication and testing of high-Q high-frequency lateral-mode clamped–clamped beam micro-resonators driven by parallel-plate electrostatic transducers fabricated in a thick epipoly technology. An innovative approach is employed to reduce an intrinsically high transducer gap value (>3.0 μm) required by the need of 15 μm thick structural layer etching down to 0.2–0.4 μm after the fabrication. This is achieved by employing an electrostatic motor that approaches the actuating and sensing electrodes close to the resonator. The electrode motor is driven with 30 V dc voltage, without any dc current consumption. Two resonators having a resonance frequency of 10 MHz have been fabricated with gap values of 0.2 and 0.4 μm respectively. A comparative analysis of performances of the two resonators is given in the paper.
Journal of Micromechanics and Microengineering 12/2002; 13(1):134. · 2.11 Impact Factor
-
Cédric Durand,
Fabrice Casset,
Bernard Legrand,
Marc Faucher,
Philippe Renaux,
Denis Mercier,
Denis Renaud,
Didier Dutartre,
Eric Ollier,
Pascal Ancey, Lionel Buchaillot
[show abstract]
[hide abstract]
ABSTRACT: The paper reports on in-plane nanometer scale resonators fabricated on 8 inch industrial tools, with a process based on the advanced CMOS Front End Silicon On Nothing Technology. The aim is to propose totally integrated time reference functions realized by small size NEMS resonators. The measurement set-up, simulation and experimental results in the range of 100MHz are presented. Environmental issues such as temperature and pressure influence on the resonator behavior are also investigated. Results are discussed and compared with analytic calculation, finite element and electrical simulations with good agreement. Work in progress focuses on improving the f.Q product, detection by the use of integrated MOSFET transistors, low voltage operation and in-IC integration.
-
[show abstract]
[hide abstract]
ABSTRACT: The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro Electro Mechanical Systems (MEMS) are good candidates to allow reconfigurable RF functions such as filters, oscillators or antennas. This paper will focus on the MEMS electromechanical resonators which show interesting performances to replace SAW filters or quartz reference oscillators, allowing smaller integrated functions with lower power consumption. The resonant frequency depends on the material properties, such as Young’s modulus and density, and on the movable mechanical structure dimensions (beam length defined by photolithography). Thus, it is possible to obtain multi frequencies resonators on a wafer. The resonator performance (frequency, quality factor) strongly depends on the environment, like moisture or pressure, which imply the need for a vacuum package. This paper will present first resonator mechanisms and mechanical behaviors followed by state of the art descriptions with applications and specifications overview. Then MEMS resonator developments at STMicroelectronics including FEM analysis, technological developments and characterization are detailed.
-
[show abstract]
[hide abstract]
ABSTRACT: The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro Electro Mechanical Systems (MEMS) are good candidates to allow reconfigurable RF functions such as filters, oscillators or antennas. This paper will focus on the MEMS electromechanical resonators which show interesting performances to replace SAW filters or quartz reference oscillators, allowing smaller integrated functions with lower power consumption. The resonant frequency depends on the material properties, such as Young's modulus and density, and on the movable mechanical structure dimensions (beam length defined by photolithography). Thus, it is possible to obtain multi frequencies resonators on a wafer. The resonator performance (frequency, quality factor) strongly depends on the environment, like moisture or pressure, which imply the need for a vacuum package. This paper will present first resonator mechanisms and mechanical behaviors followed by state of the art descriptions with applications and specifications overview. Then MEMS resonator developments at STMicroelectronics including FEM analysis, technological developments and characterization are detailed.
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2007, Stresa, lago Maggiore, Italy.
-
[show abstract]
[hide abstract]
ABSTRACT: A 2.4 MHz tunable bandpass T-filter built from three micromechanical silicon-micromachined electrostatically-driven resonators is demonstrated for the first time. Non-linear properties of electrostatical transducers are used to obtain a voltage-control of the transmission zero and pole distribution; a novel charge biasing technique is employed for electrostatical transducer biasing. Transmission zero frequency tuning is demonstrated.
Sensors and Actuators A: Physical.
-
[show abstract]
[hide abstract]
ABSTRACT: The process and realization of a light and low resistive antenna for wireless communications by inductive coupling at 13.56 MHz is presented. The antenna is realized on an insulated substrate made of SU-8 resist in order to prevent the losses due to eddy currents from occurring and to strongly decrease its weight. The conductor is obtained by electroplating 24 m of gold in a mold of AZ-4562 resist. A Q factor of 29 has been obtained with a maximum of 37 at 19 MHz, for antenna dimensions of 1.51.5 cm 2 . This antenna is the key component for a wireless power supplied microrobot. © 2002 American Vacuum Society.
-
Eric Colinet,
Cédric Durand,
Laurent Duraffourg,
Patrick Audebert,
Guillaume Dumas,
Fabrice Casset,
Eric Ollier,
Pascal Ancey,
Jean-François Carpentier, Lionel Buchaillot,
Adrian M. Ionescu
-
[show abstract]
[hide abstract]
ABSTRACT: This paper reports on the design and characterization of 2.4 and 9.2 MHz fourth and sixth order passband microelectromechanical coupled-resonator filters implemented in a 15 μm thick-film epitaxial polysilicon technology. The work uses a novel approach in the building of coupled-resonator electromechanical filter structures using on-line controlled electrostatic coupling. Mechanical springs commonly used to couple micromechanical resonators were replaced by electrostatical links created by pairs of biased electrostatical transducers. To control the coupling strength, an original biasing scheme of electrostatical transducers is proposed. The idea is to maintain a fixed charge on the floating-potential middle electrode of the electrostatical coupler. This electrode does not need any external electrical connection, thus does not suffer from parasitic capacitances.The coupling factor is directly controlled by coupling transducer bias voltages, allowing the control of the filter pole frequencies. A voltage controlled bandpass filter at 9.2 MHz showed a bandwidth with a tuning range of 3.18–47.4 kHz.
Sensors and Actuators A: Physical.
