-
[show abstract]
[hide abstract]
ABSTRACT: We report here on high resonance frequency AFM probes based on MEMS bulk mode resonators. They consist on silicon ring resonators with capacitive transducers vibrating in the in-plane elliptic mode. Nano-tips placed at the maximum of vibration are fabricated in batch process. After electrical and optical characterizations, chips supporting the resonator and the prominent tip are extracted from the wafer. Next, the AFM nanoprobes are integrated in a commercially available AFM set-up with a modified probe holder. Experimental results of high resonance frequency AFM images are presented.
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on; 02/2011
-
M. Faucher,
Y. Cordier,
F. Semond,
V. Brandli,
B. Grimbert,
A.B. Amar,
M. Werquin,
C. Boyaval,
C. Gaquière,
D. Théron,
L. Buchaillot
[show abstract]
[hide abstract]
ABSTRACT: The properties of a new class of electromechanical resonators based on GaN are presented. By using the two-dimensional electron gas (2-DEG) present at the AlGaN/GaN interface and the piezoelectric properties of this heterostructure, we use the R-HEMT (Resonant High Electron Mobility Transistor) as an active piezoelectric transducer up to 5MHz. In addition to the amplification effect of piezoelectric detection, we show that the active piezoelectric transduction has a strong dependence with the channel mobility that is controlled by a top gate. This allows to envision highly tunable sensors with co-integrated HEMT electronics.
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on; 02/2011
-
[show abstract]
[hide abstract]
ABSTRACT: Atomic force microscopy (AFM) is a powerful imaging tool with high-resolution imaging capability. AFM probes consist of a very sharp tip at the end of a silicon cantilever that can respond to surface artefacts to produce an image of the topography or surface features. They are intrinsically passive devices. For imaging soft biological samples, and also for samples in liquid, it is essential to control the AFM tip position, both statically and dynamically, and this is not possible using external actuators mounted on the AFM chip. AFM cantilevers have been fabricated using silicon micromachining to incorporate a piezoelectric thin film actuator for precise control. The piezoelectric thin films have been fully characterized to determine their actuation performance and to characterize the operation of the integrated device. Examples of the spatial and vertical response are presented to illustrate their imaging capability. For operation in a liquid environment, the dynamic behaviour has been modelled and verified experimentally. The optimal drive conditions for the cantilever, along with their dynamic response, including frequency and phase in air and water, are presented.
Journal of Micromechanics and Microengineering 07/2010; 20(8):085010. · 2.11 Impact Factor
-
[show abstract]
[hide abstract]
ABSTRACT: We present an integrated force probe based on a silicon bulk-mode MEMS resonator. This device uses a silicon ring with symmetrical tips vibrating in the elliptic vibration mode. The tips enable us to make mechanical interactions with surfaces or external objects. Both excitation and detection of the resonator are integrated thanks to electrostatic actuation and capacitive detection. Apart from optical and electrical characterizations of the fabricated device, we report for the first time on the interaction between the resonator tip and a hydrodynamic force applied thanks to a water droplet. This demonstrates a first step toward high frequency atomic force probes for liquid medium applications.
Journal of Micromechanics and Microengineering 10/2009; 19(11):115009. · 2.11 Impact Factor
-
C. Durand,
F. Casset,
B. Legrand, M. Faucher,
P. Renaux,
D. Mercier,
D. Renaud,
D. Dutartre,
E. Ollier,
P. Ancey,
L. Buchaillot
[show abstract]
[hide abstract]
ABSTRACT: The paper reports on in-plane nanometer scale resonators fabricated on 8 inch industrial tools, with a process based on the advanced CMOS Front End Silicon On Nothing Technology. The aim is to propose totally integrated time reference functions realized by small size NEMS resonators. The measurement set-up, simulation and experimental results in the range of 100 MHz are presented. Environmental issues such as temperature and pressure influence on the resonator behavior are also investigated. Results are discussed and compared with analytic calculation, finite element and electrical simulations with good agreement. Work in progress focuses on improving the f.Q product, detection by the use of integrated MOSFET transistors, low voltage operation and in-IC integration.
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on; 02/2008
-
CoRR. 01/2007; abs/0711.3321.
-
-
Forum des Microscopies à Sonde Locale.
-
4èmes Journées Nationales en Nanosciences et Nanotechnologies, J3N 2009.
-
La micro-nano électronique, enjeux et mutations.
-
Proceedings of 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011.
-
M. Faucher,
Y. Cordier,
F. Semond,
V. Brandli,
B. Grimbert,
A. Ben Amar,
M. Werquin,
C. Boyaval,
C. Gaquière,
D. Théron,
L. Buchaillot
Proceedings of 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011.
-
[show abstract]
[hide abstract]
ABSTRACT: This paper presents results about fabrication and operation of electrostatic actuators in liquids with various permittivities. In the static mode, we provide experimental and theoretical demonstration that the pull-in effect can be shifted beyond one third of the initial gap and even be eliminated when electrostatic actuators are operated in liquids. This should benefit to applications in microfluidics requiring either binary state actuation (e.g. pumps, valves) or continuous displacements over the whole gap (e.g. microtweezers). In dynamic mode, actuators like micro-cantilevers present a great interest for Atomic Force Microscopy (AFM) in liquids. As this application requires a good understanding of the cantilever resonance frequency and Q-factor, an analytical modeling in liquid environment has been established. The theoretically derived curves are validated by experimental results using a nitride encapsulated cantilever with integrated electrostatic actuation. Electrode potential screening and undesirable electrochemistry in dielectric liquids are counteracted using AC-voltages. Both experimental and theoretical results should prove useful in micro-cantilever design for AFM in liquids.
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP’06, 26-28 April 2006, Stresa, Lago Maggiore, Italy, 6 p.
