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ABSTRACT: In this letter, the Schottky-barrier height (SBH) lowering in Pt silicide/n-Si junctions and its implications to Schottky-barrier source/drain p-field-effect transistors (p-SBFETs) are studied experimentally and numerically. We demonstrate that the increase of the n-Si substrate doping is responsible for a larger hole SBH lowering through an image-force mechanism, which leads to a substantial gain of the drive current in the long-channel bulk p-SBFETs. Numerical simulations show that the channel doping concentration is also critical for short-channel p/n-silicon-on-insulator SBFET performance
IEEE Electron Device Letters 03/2007; · 2.85 Impact Factor
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G.P. Lousberg,
H.Y. Yu, B. Froment,
M.F. Li,
E. Augendre,
A. De Keersgieter,
C. Demeurisse,
S. Brus,
B. Degroote,
T. Hoffmann,
A. Lauwers,
M. DePotter,
S. Kubicek,
K. Anil,
P. Absil,
M. Jurczak,
S. Biesemans
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ABSTRACT: In this paper, the authors study experimentally and numerically the Schottky barrier height (SBH) lowering of Pt silicide/n-Si diodes and its implications to Schottky-barrier (SB) source/drain p-FETs. The authors demonstrate that hole SBH can be lowered through an image-force mechanism by increasing the n-Si substrate doping, which leads to a substantial gain of the drive current in the long-channel bulk p-SBFETs. Numerical simulations show that the channel doping concentration is also critical for short-channel n- & p-SOI SBFETs performance
Solid-State Device Research Conference, 2006. ESSDERC 2006. Proceeding of the 36th European; 10/2006
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H.Y. Yu,
J.A. Kittl,
A. Lauwers,
R. Singanamalla,
C. Demeurisse,
S. Kubicek,
E. Augendre,
A. Veloso,
S. Brus,
C. Vrancken, [......],
M. Demand,
A. Rothchild, B. Froment,
M. van Dal,
K.De. Meyer,
M.F. Li,
J.D. Chen,
M. Jurczak,
P.P. Absil,
S. Biesemans
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ABSTRACT: This report discusses a new and practical approach to implement low V<sub>t</sub> bulk CMOS using Ni-based FUSI MOSFETs. On the nFET, we demonstrate for the first time that incorporating Yb by ion implantation can achieve similar reduction of effective work function (WF) compared to alloying making it a candidate for CMOS integration. We complement our previous work on WF modulation by Yb on NiSi/SiON with new data on NiSi/HfSiON and NiGeSi/HfSiON. On the pFET, we study the effect of Al and Pt on Ni-rich FUSI and integrate it with a SiGe-channel. Integration into our reference devices resulted in a V<sub>t</sub> reduction from 0.55/0.61V down to 0.30/0.25V for nFET (NiSi:Yb gate) and pFET (Ni<sub>2 </sub>Si:Pt gate + SiGe channel) respectively on SiON without degradation of the dielectric integrity and long channel mobility, and without an increase in gate leakage and D<sub>it</sub>
VLSI Technology, 2006. Digest of Technical Papers. 2006 Symposium on;