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ABSTRACT: We present an experimental study of a confined nanoflow, which is generated by a sphere oscillating in the proximity of a flat solid wall in a simple fluid. Varying the oscillation frequency, the confining length scale, and the fluid mean free path over a broad range provides a detailed map of the flow. We use this experimental map to construct a scaling function, which describes the nanoflow in the entire parameter space, including both the hydrodynamic and the kinetic regimes. Our scaling function unifies previous theories based on the slip boundary condition and the effective viscosity.
Physical Review Letters 02/2012; 108(8):084501. · 7.37 Impact Factor
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ABSTRACT: We have fabricated and characterized a novel superhydrophobic system, a meshlike porous superhydrophobic membrane with solid area fraction Φ(s), which can maintain intimate contact with outside air and water reservoirs simultaneously. Oscillatory hydrodynamic measurements on porous superhydrophobic membranes as a function of Φ(s) reveal surprising effects. The hydrodynamic mass oscillating in phase with the membranes stays constant for 0.9≲Φ(s)≤1, but drops precipitously for Φ(s)<0.9. The viscous friction shows a similar drop after a slow initial decrease proportional to Φ(s). We attribute these effects to the percolation of a stable Knudsen layer of air at the interface.
Physical Review Letters 10/2011; 107(17):174501. · 7.37 Impact Factor
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ABSTRACT: We report a versatile all optical technique to excite and read-out a distributed nanoelectromechanical systems (NEMS) array. The NEMS array is driven by a distributed, intensity modulated optical pump through the photothermal effect. The ensuing vibrational response of the array is multiplexed onto a single probe beam in the form of a high frequency phase modulation. The phase modulation is optically down converted to a low frequency intensity modulation using an adaptive full-field interferometer, and subsequently detected using a CCD array. Rapid and single step mechanical characterization of ∼44 nominally identical high-frequency resonators is demonstrated. The technique may enable sensitivity improvements over single NEMS resonators by averaging signals coming from a multitude of devices in the array. In addition, the diffraction limited spatial resolution may allow for position-dependent read-out of NEMS sensor chips for sensing multiple analytes or spatially inhomogeneous forces.
Nano Letters 02/2011; 11(3):1014-9. · 13.20 Impact Factor
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ABSTRACT: A solid body undergoing oscillatory motion in a fluid generates an oscillating flow. Oscillating flows in Newtonian fluids were first treated by G.G. Stokes in 1851. Since then, this problem has attracted much attention, mostly due to its technological significance. Recent advances in micro- and nanotechnology require that this problem be revisited: miniaturized mechanical resonators with linear dimensions in microns and sub-microns-microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS), respectively-give rise to oscillating flows when operated in fluids. Yet flow parameters for these devices, such as the characteristic flow time and length scales, may deviate greatly from those in Stokes' solution. As a result, new and interesting physics emerges with important consequences to device applications. In this review, we shall provide an introduction to this area of fluid dynamics, called high-frequency nanofluidics, with emphasis on both theory and experiments.
Lab on a Chip 11/2010; 10(22):3013-25. · 5.67 Impact Factor
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ABSTRACT: We show that oscillating flow of a simple fluid in both the Newtonian and the non-Newtonian regime can be described by a universal function of a single dimensionless scaling parameter omega tau, where omega is the oscillation (angular) frequency and tau is the fluid relaxation time; geometry and linear dimension bear no effect on the flow. Energy dissipation of mechanical resonators in a rarefied gas follows this universality closely in a broad linear dimension (10(-6) m < L < 10(-2) m) and frequency (10(5) Hz < omega/2pi < 10(8) Hz) range. Our results suggest a deep connection between flows of simple and complex fluids.
Physical Review Letters 12/2008; 101(26):264501. · 7.37 Impact Factor
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ABSTRACT: The scanning tunnelling microscope (STM) relies on localized electron tunnelling between a sharp probe tip and a conducting sample to attain atomic-scale spatial resolution. In the 25-year period since its invention, the STM has helped uncover a wealth of phenomena in diverse physical systems--ranging from semiconductors to superconductors to atomic and molecular nanosystems. A severe limitation in scanning tunnelling microscopy is the low temporal resolution, originating from the diminished high-frequency response of the tunnel current readout circuitry. Here we overcome this limitation by measuring the reflection from a resonant inductor-capacitor circuit in which the tunnel junction is embedded, and demonstrate electronic bandwidths as high as 10 MHz. This approximately 100-fold bandwidth improvement on the state of the art translates into fast surface topography as well as delicate measurements in mesoscopic electronics and mechanics. Broadband noise measurements across the tunnel junction using this radio-frequency STM have allowed us to perform thermometry at the nanometre scale. Furthermore, we have detected high-frequency mechanical motion with a sensitivity approaching approximately 15 fm Hz(-1/2). This sensitivity is on par with the highest available from nanoscale optical and electrical displacement detection techniques, and the radio-frequency STM is expected to be capable of quantum-limited position measurements.
Nature 12/2007; 450(7166):85-8. · 36.28 Impact Factor
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ABSTRACT: We describe a fiber-optic interferometer to detect the motion of nanomechanical resonators. In this system, the primary technical challenge of aligning the fiber-optic probe to nanometer-scale resonators is overcome by simply monitoring the scattered light from the devices. The system includes no free-space optical components, and is thus simple, stable, and compact with an estimated displacement sensitivity of ∼ 0.3 pm/ at optical power levels of ∼ 0.75 mW.
Applied Physics Letters 08/2007; 91(9):093112-093112-3. · 3.84 Impact Factor
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ABSTRACT: Here we apply nanomechanical resonators to the study of oscillatory fluid dynamics. A high-resonance-frequency nanomechanical resonator generates a rapidly oscillating flow in a surrounding gaseous environment; the nature of the flow is studied through the flow-resonator interaction. Over the broad frequency and pressure range explored, we observe signs of a transition from Newtonian to non-Newtonian flow at omega tau approximately 1, where tau is a properly defined fluid relaxation time. The obtained experimental data appear to be in close quantitative agreement with a theory that predicts a purely elastic fluid response as omega tau --> infinity.
Physical Review Letters 06/2007; 98(25):254505. · 7.37 Impact Factor
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ABSTRACT: We describe photothermal operation of nanoelectromechanical systems (NEMS) in ambient atmosphere. Using a tightly focused modulated laser source, we have actuated the out-of-plane flexural resonances of bilayered doubly clamped beams. The optically detected displacement profiles in these beams are consistent with a model where the absorbed laser power results in a local temperature rise and a subsequent thermally induced bending moment. The described technique allows probing and actuation of NEMS with exquisite spatial and temporal resolution. From a device perspective, the technique offers immense frequency tunability and may enable future NEMS that can be remotely accessed without electronic coupling.
Applied Physics Letters 06/2006; · 3.84 Impact Factor
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ABSTRACT: Very high frequency (VHF) nanoelectromechanical systems (NEMS) provide unprecedented sensitivity for inertial mass sensing. We demonstrate in situ measurements in real time with mass noise floor approximately 20 zg. Our best mass resolution corresponds to approximately 7 zg, equivalent to approximately 30 xenon atoms or the mass of an individual 4 kDa molecule. Detailed analysis of the ultimate sensitivity of such devices based on these experimental results indicates that NEMS can ultimately provide inertial mass sensing of individual intact, electrically neutral macromolecules with single-Dalton (1 amu) resolution.
Nano Letters 05/2006; 6(4):583-6. · 13.20 Impact Factor
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Physical Review Letters 01/2006; 95(24):248901; author reply 248902. · 7.37 Impact Factor
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K L Ekinci
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ABSTRACT: Electromechanical devices are rapidly being miniaturized, following the trend in commercial transistor electronics. Miniature electromechanical devices--now with dimensions in the deep sub-micrometer range--are envisioned for a variety of applications as well as for accessing interesting regimes in fundamental physics. Among the most important technological challenges in the operation of these nanoelectromechanical systems (NEMS) are the actuation and detection of their sub-nanometer displacements at high frequencies. In this Review, we shall focus on this most central concern in NEMS technology: realization of electromechanical transducers at the nanoscale. The currently available techniques to actuate and detect NEMS motion are introduced, and the accuracy, bandwidth, and robustness of these techniques are discussed.
Small 09/2005; 1(8-9):786-97. · 8.35 Impact Factor
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ABSTRACT: In a recent letter, Gaidarzhy et al. claim to have observed evidence for quantized displacements of a nanomechanical oscillator. We contend that the evidence, analysis, claims, and conclusions presented are contrary to expectations from fundamentals of quantum mechanics and elasticity theory, and that the method used by the authors is unsuitable in principle to observe the quantized energy states of a nanomechanical structure.
04/2005;
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ABSTRACT: We describe the application of nanoelectromechanical systems (NEMS) to ultrasensitive mass detection. In these experiments, a modulated flux of atoms was adsorbed upon the surface of a 32.8 MHz NEMS resonator within an ultrahigh-vacuum environment. The mass-induced resonance frequency shifts by these adsorbates were then measured to ascertain a mass sensitivity of 2.53×10<sup>-18</sup> g. In these initial measurements, this sensitivity is limited by the noise in the NEMS displacement transducer; the ultimate limits of the technique are set by fundamental phase noise processes. Our results and analysis indicate that mass sensing of individual molecules will be realizable with optimized NEMS devices. © 2004 American Institute of Physics.
Applied Physics Letters 06/2004; · 3.84 Impact Factor
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ABSTRACT: Nanomechanical resonators can now be realized that achieve fundamental resonance frequencies exceeding 1 GHz, with quality factors (Q) in the range 1,000 - 100,000. The minuscule active masses of these devices, in conjunction with their high Qs, translate into unprecedented inertial mass sensitivities. This makes them natural candidates for a variety of mass sensing applications. Here we evaluate the ultimate mass sensitivity limits for nanomechanical resonators operating in vacuo, which are imposed by a number of fundamental physical noise processes. Our analyses indicate that nanomechanical resonators offer immense potential for mass sensing - ultimately with resolution at the level of individual molecules. Comment: preprint, subm. to J. Appl. Phys. - 32 pages, 6 figures, 2 tables
09/2003;
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ABSTRACT: We describe the application of nanoelectromechanical systems (NEMS) to ultrasensitive mass detection. In these experiments, a modulated flux of atoms was adsorbed upon the surface of a 32.8 MHz NEMS resonator within an ultrahigh-vacuum environment. The mass-induced resonance frequency shifts by these adsorbates were then measured to ascertain a mass sensitivity of 2.53×10^–18 g. In these initial measurements, this sensitivity is limited by the noise in the NEMS displacement transducer; the ultimate limits of the technique are set by fundamental phase noise processes. Our results and analysis indicate that mass sensing of individual molecules will be realizable with optimized NEMS devices.
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ABSTRACT: We report measurements of intrinsic dissipation in micron-sized suspended resonators machined from single crystals of galium arsenide and silicon. In these experiments on high-frequency micromechanical resonators, designed to understand intrinsic mechanisms of dissipation, we explore dependence of dissipation on temperature, magnetic field, frequency, and size. In contrast to most of the previous measurements of acoustic attenuation in crystalline and amorphous structures in this frequency range, ours is a resonant measurement; dissipation is measured at the natural frequencies of structural resonance, or modes of the structure associated with flexural and torsional motion. In all our samples we find a weakly temperature dependent dissipation at low temperatures. We compare and contrast our data to various probable mechanisms, including thermoelasticity, clamping, anharmonic mode-coupling, surface anisotropy and defect motion, both in bulk and on surface. The observed parametric dependencies indicate that the internal defect motion is the dominant mechanism of intrinsic dissipation in our samples.
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ABSTRACT: We describe a broadband radio frequency balanced bridge technique for electronic detection of displacement in nanoelectromechanical systems (NEMS). With its two-port actuation-detection configuration, this approach generates a background-nulled electromotive force in a dc magnetic field that is proportional to the displacement of the NEMS resonator. We demonstrate the effectiveness of the technique by detecting small impedance changes originating from NEMS electromechanical resonances that are accompanied by large static background impedances at very high frequencies. This technique allows the study of important experimental systems such as doped semiconductor NEMS and may provide benefits to other high frequency displacement transduction circuits.
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ABSTRACT: Nanoelectromechanical systems (NEMS) are drawing interest from both technical and scientific communities. These are electromechanical systems, much like microelectromechanical systems, mostly operated in their resonant modes with dimensions in the deep submicron. In this size regime, they come with extremely high fundamental resonance frequencies, diminished active masses,and tolerable force constants; the quality (Q) factors of resonance are in the range Q~10^3–10^5—significantly higher than those of electrical resonant circuits. These attributes collectively make NEMS suitable for a multitude of technological applications such as ultrafast sensors, actuators, and signal processing components. Experimentally, NEMS are expected to open up investigations of phonon mediated mechanical processes and of the quantum behavior of mesoscopic mechanical systems. However, there still exist fundamental and technological challenges to NEMS optimization. In this review we shall provide a balanced introduction to NEMS by discussing the prospects and challenges in this rapidly developing field and outline an exciting emerging application, nanoelectromechanical mass detection.
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ABSTRACT: SiC is an extremely promising material for nanoelectromechanical systems given its large Young's modulus and robust surface properties. We have patterned nanometer scale electromechanical resonators from single-crystal 3C-SiC layers grown epitaxially upon Si substrates. A surface nanomachining process is described that involves electron beam lithography followed by dry anisotropic and selective electron cyclotron resonance plasma etching steps. Measurements on a representative family of the resulting devices demonstrate that, for a given geometry, nanometer-scale SiC resonators are capable of yielding substantially higher frequencies than GaAs and Si resonators.
