ABSTRACT: A method will be presented which is suitable to calculate the overall and partial capacitances of two rectangularly shaped conductors over a three-layered material. It is based on the complex image method. The solution for the determination of the necessary exponential terms used by the complex image method is shown. The terms are calculated using an iterative approach which will be compared with a previous method. The complex images are used to calculate the partial capacitances of the desired structures. The used structure consists of a three-layered material underneath the conductors but a multi-layered material can also be modelled. The method which has to be used in the case of a multi-layered material will also be presented.
Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on; 06/2003