Article

Compact soft x-ray transmission microscopy with sub-50 nm spatial resolution

Department of Mechanical Engineering, Chubu University, Касугай, Aichi, Japan
Physics in Medicine and Biology (Impact Factor: 2.92). 04/2006; 51(6):N99-107. DOI: 10.1088/0031-9155/51/6/N01
Source: PubMed

ABSTRACT In this paper, the development of compact transmission soft x-ray microscopy (XM) with sub-50 nm spatial resolution for biomedical applications is described. The compact transmission soft x-ray microscope operates at lambda = 2.88 nm (430 eV) and is based on a tabletop regenerative x-ray source in combination with a tandem ellipsoidal condenser mirror for sample illumination, an objective micro zone plate and a thinned back-illuminated charge coupled device to record an x-ray image. The new, compact x-ray microscope system requires the fabrication of proper x-ray optical devices in order to obtain high-quality images. For an application-oriented microscope, the alignment procedure is fully automated via computer control through a graphic user interface. In imaging studies using our compact XM system, a gold mesh image was obtained with 45 nm resolution at x580 magnification and 1 min exposure. Images of a biological sample (Coscinodiscus oculoides) were recorded.

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    • "A different approach was recently demonstrated by Hoshino & Aoki (2006), where a broadband solid-tantalumtarget laser-plasma source in combination with Woltertype grazing-incidence mirrors used both as condenser and objective resulted in an estimated resolution ∼100 nm. Kyong et al. (2006) combined an elliptical condenser mirror and zone plate optics for λ = 2.88 nm microscopy, claiming 50 nm resolution. Scanning microscopy with a laser-plasma source operating at 3.37 nm using a Mylar ® target (DuPont Teijin Films, Hopewell, VA, USA) was demonstrated by Michette et al. (2003), and was capable of resolving structures with a period ∼400 nm. "
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