Article
A complete analysis of the laser beam deflection systems used in cantilever-based systems.
Department of Physics and Physical Oceanography, Memorial University. St. John's, NL., Canada A1B 3X7.
Ultramicroscopy (impact factor:
2.47).
107(4-5):422-30.
DOI:10.1016/j.ultramic.2006.11.001
pp.422-30
Source: PubMed
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Citations (0)
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Article: A force-matching method for quantitative hardness measurements by atomic force microscopy with diamond-tipped sapphire cantilevers.
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ABSTRACT: We present a new method to improve the accuracy of force application and hardness measurements in hard surfaces by using low-force (<50 μN) nanoindentation technique with a cube-corner diamond tip mounted on an atomic force microscopy (AFM) sapphire cantilever. A force calibration procedure based on the force-matching method, which explicitly includes the tip geometry and the tip-substrate deformation during calibration, is proposed. A computer algorithm to automate this calibration procedure is also made available. The proposed methodology is verified experimentally by conducting AFM nanoindentations on fused quartz, Si(100) and a 100-nm-thick film of gold deposited on Si(100). Comparison of experimental results with finite element simulations and literature data yields excellent agreement. In particular, hardness measurements using AFM nanoindentation in fused quartz show a systematic error less than 2% when applying the force-matching method, as opposed to 37% with the standard protocol. Furthermore, the residual impressions left in the different substrates are examined in detail using non-contact AFM imaging with the same diamond probe. The uncertainty of method to measure the projected area of contact at maximum force due to elastic recovery effects is also discussed.Ultramicroscopy 12/2010; 111(1):11-9. · 2.47 Impact Factor
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Keywords
adjustable parameters
atomic force microscopes
cantilever deflection measurements
cantilever-based sensors
cantilever/optical beam
detection system
different stages
elementary geometric optics
full advantage
minimal effort
optical beam techniques
position sensitive photo-detector
standard vector analysis