Fabrication of highly rotational symmetric quasi-periodic structures by multiexposure of a three-beam interference technique
ABSTRACT A simple and efficient interference method for fabricating highly symmetric two-dimensional (2-D) quasi-periodic structures (QPSs) is theoretically and experimentally demonstrated. With a three-beam interference technique, one can fabricate a periodic 2-D structure having sixfold symmetry. When this structure is multiduplicated into other specific orientations its combination results in a QPS with multifold symmetry. By use of n exposures with a rotation angle of 60 degrees /n, one can create a 2-D QPS with six n-fold symmetry. The QPS with a super high symmetry level, as high as 60-fold, is demonstrated for the first time to the best of our knowledge. The diffraction pattern of a QPS is consistent with the Fourier transform calculation. The fabricated structures should be useful for many applications, such as isotropic bandgap materials and extraction enhancement of light-emitting diodes.
- SourceAvailable from: Ngoc Diep LaiHolography, Research and Technologies, 02/2011; , ISBN: 978-953-307-227-2
Conference Paper: Micro and nanostructuration of polymer materials and applications[Show abstract] [Hide abstract]
ABSTRACT: Polymer materials offer unique opportunities in nanophotonics and nanobiosystems since both top-down and bottom-up strategies can be pursued and combined towards the nanoscale. Besides, polym er materials can be, with simple metho ds, functionalized with nonlinear optical or fluorescent materials (organic, norganic, or metal). The ensemble can be optically structured in a flexible way to obtain a polymer-based photonic nanostructure (host) containing active materials (guest), which may provide an enhancement of the guest optical response ,leading to attractive applications. We have develop ed two imp ortant fabrication techniques, namely interference and one-photon absorption direct laser writing, which present different aadvantages and allow b oth to obtain desired micro and nanometric 2D and 3D structures. These polymer-based structures are promising for many potential applications, for example, laser, nonlinear optics, and plasmonics.Proc. of SPIE, Nanobiosystems: Processing, Characterization, and Applications VII, San Diego Convention Center San Diego, California, United States; 08/2014
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ABSTRACT: Multibeam interference lithography (MBIL) represents a versatile, wafer-scale, rapid, and cost-effective fabrication technique for periodic-based microstructures. However, integrating arbitrary and nonperiodic functional elements within an MBIL-defined lattice typically requires an additional time-consuming step. To address this issue, the authors recently introduced pattern-integrated interference lithography (PIIL) that couples MBIL and imaging lithography simultaneously. In this work, the authors present a comprehensive multibeam high-numerical-aperture (NA) vector volume interference/image model for PIIL. This model accounts for the vector nature of light in a high-NA PIIL implementation, the beam propagation within a photoresist film, and the influence of the beam amplitudes and polarizations on the interference pattern. Using this model, PIIL capabilities are illustrated through examples of pattern-integrated one-, two-, and three-dimensional periodic microstructures.Journal of vacuum science & technology. B, Microelectronics and nanometer structures: processing, measurement, and phenomena: an official journal of the American Vacuum Society 11/2013; 31(6):06F501-06F501-7. DOI:10.1116/1.4826560 · 1.36 Impact Factor